JPH0517886Y2 - - Google Patents

Info

Publication number
JPH0517886Y2
JPH0517886Y2 JP1992007037U JP703792U JPH0517886Y2 JP H0517886 Y2 JPH0517886 Y2 JP H0517886Y2 JP 1992007037 U JP1992007037 U JP 1992007037U JP 703792 U JP703792 U JP 703792U JP H0517886 Y2 JPH0517886 Y2 JP H0517886Y2
Authority
JP
Japan
Prior art keywords
cassette
drive shaft
wafer
mounting table
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1992007037U
Other languages
English (en)
Japanese (ja)
Other versions
JPH04117449U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP703792U priority Critical patent/JPH04117449U/ja
Publication of JPH04117449U publication Critical patent/JPH04117449U/ja
Application granted granted Critical
Publication of JPH0517886Y2 publication Critical patent/JPH0517886Y2/ja
Granted legal-status Critical Current

Links

JP703792U 1992-01-24 1992-01-24 半導体ウエハの整列装置 Granted JPH04117449U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP703792U JPH04117449U (ja) 1992-01-24 1992-01-24 半導体ウエハの整列装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP703792U JPH04117449U (ja) 1992-01-24 1992-01-24 半導体ウエハの整列装置

Publications (2)

Publication Number Publication Date
JPH04117449U JPH04117449U (ja) 1992-10-21
JPH0517886Y2 true JPH0517886Y2 (pm) 1993-05-13

Family

ID=31899050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP703792U Granted JPH04117449U (ja) 1992-01-24 1992-01-24 半導体ウエハの整列装置

Country Status (1)

Country Link
JP (1) JPH04117449U (pm)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821352A (ja) * 1981-07-29 1983-02-08 Toshiba Corp 半導体ウエハの方向決め方式
JPS5978535A (ja) * 1982-10-27 1984-05-07 Mitsubishi Electric Corp 多数被処理品の処理設備
JPS60118238U (ja) * 1984-01-19 1985-08-09 テル相模株式会社 フアセツトアライナ微調装置
JPS6224638A (ja) * 1985-07-24 1987-02-02 Matsushita Electric Ind Co Ltd ウエハ整列装置

Also Published As

Publication number Publication date
JPH04117449U (ja) 1992-10-21

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