JPH0516523B2 - - Google Patents
Info
- Publication number
- JPH0516523B2 JPH0516523B2 JP5800785A JP5800785A JPH0516523B2 JP H0516523 B2 JPH0516523 B2 JP H0516523B2 JP 5800785 A JP5800785 A JP 5800785A JP 5800785 A JP5800785 A JP 5800785A JP H0516523 B2 JPH0516523 B2 JP H0516523B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- piezoelectric element
- section
- detection
- angular velocity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 claims description 35
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 6
- 238000009429 electrical wiring Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60058007A JPS61215916A (ja) | 1985-03-21 | 1985-03-21 | 角速度センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60058007A JPS61215916A (ja) | 1985-03-21 | 1985-03-21 | 角速度センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61215916A JPS61215916A (ja) | 1986-09-25 |
| JPH0516523B2 true JPH0516523B2 (fr) | 1993-03-04 |
Family
ID=13071914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60058007A Granted JPS61215916A (ja) | 1985-03-21 | 1985-03-21 | 角速度センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61215916A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02212711A (ja) * | 1989-02-13 | 1990-08-23 | Nec Home Electron Ltd | 振動ジャイロとその零点調整装置 |
| JP4924858B2 (ja) * | 2001-07-06 | 2012-04-25 | セイコーエプソン株式会社 | 角速度測定装置 |
| JP4924912B2 (ja) * | 2011-08-24 | 2012-04-25 | セイコーエプソン株式会社 | 角速度測定方法および角速度測定装置の診断回路 |
-
1985
- 1985-03-21 JP JP60058007A patent/JPS61215916A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61215916A (ja) | 1986-09-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4584885A (en) | Capacitive detector for transducers | |
| JP3141645B2 (ja) | 圧力センサ | |
| JPH0516523B2 (fr) | ||
| JP3937589B2 (ja) | 角速度センサ | |
| US5659262A (en) | Offset trimming for a micromachined sensing device | |
| US5783897A (en) | Vibrating gyroscope | |
| JP2001133267A (ja) | 振動ジャイロ | |
| JPS612013A (ja) | 角速度センサ | |
| JP3458732B2 (ja) | 振動型センサの断線検出装置 | |
| JPS6177712A (ja) | 角速度センサ | |
| JPH0718705B2 (ja) | 角速度センサ | |
| JPH08210856A (ja) | 圧電振動子を使用した検出装置 | |
| JP3250085B2 (ja) | 加速度センサ | |
| JPH03226621A (ja) | 角速度センサ駆動装置 | |
| JPH04295716A (ja) | 角速度センサ装置 | |
| JPS6067815A (ja) | 角速度センサ | |
| JPS6232370A (ja) | 表面電位検出装置 | |
| JPS59127781U (ja) | 振動帰還型超音波発振器 | |
| JPH0519795Y2 (fr) | ||
| JPH08304446A (ja) | 圧電型変位センサ | |
| JP3122925B2 (ja) | 圧電振動ジャイロ用の圧電振動子 | |
| JP2583691B2 (ja) | 振動ジャイロ | |
| JP2571893B2 (ja) | 振動ジャイロ | |
| JP2607403B2 (ja) | ２軸加速度センサ | |
| JP2583704B2 (ja) | 発振回路 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |