JPH051584B2 - - Google Patents

Info

Publication number
JPH051584B2
JPH051584B2 JP61025525A JP2552586A JPH051584B2 JP H051584 B2 JPH051584 B2 JP H051584B2 JP 61025525 A JP61025525 A JP 61025525A JP 2552586 A JP2552586 A JP 2552586A JP H051584 B2 JPH051584 B2 JP H051584B2
Authority
JP
Japan
Prior art keywords
sample
charged particle
microchannel plate
mcp
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61025525A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62184752A (ja
Inventor
Masashi Ataka
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP61025525A priority Critical patent/JPS62184752A/ja
Publication of JPS62184752A publication Critical patent/JPS62184752A/ja
Publication of JPH051584B2 publication Critical patent/JPH051584B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP61025525A 1986-02-07 1986-02-07 荷電粒子ビ−ム測長機 Granted JPS62184752A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61025525A JPS62184752A (ja) 1986-02-07 1986-02-07 荷電粒子ビ−ム測長機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61025525A JPS62184752A (ja) 1986-02-07 1986-02-07 荷電粒子ビ−ム測長機

Publications (2)

Publication Number Publication Date
JPS62184752A JPS62184752A (ja) 1987-08-13
JPH051584B2 true JPH051584B2 (enrdf_load_html_response) 1993-01-08

Family

ID=12168464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61025525A Granted JPS62184752A (ja) 1986-02-07 1986-02-07 荷電粒子ビ−ム測長機

Country Status (1)

Country Link
JP (1) JPS62184752A (enrdf_load_html_response)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5202348A (en) * 1989-12-07 1993-04-13 The University Of British Columbia Thiarubrine antifungal agents
PL207199B1 (pl) 2003-04-17 2010-11-30 Politechnika Wroclawska Układ detekcyjny elektronów wtórnych do skaningowego mikroskopu elektronowego
PL210038B1 (pl) * 2004-01-21 2011-11-30 Politechnika Wroclawska Sposób i układ do kierunkowej detekcji elektronów w skaningowym mikroskopie elektronowym
US7531812B2 (en) 2003-10-27 2009-05-12 Politechnika Wroclawska Method and system for the directional detection of electrons in a scanning electron microscope
EP3203494B1 (en) * 2014-09-24 2019-12-18 National Institute for Materials Science Energy-discrimination electron detector and scanning electron microscope in which same is used

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124852U (ja) * 1984-02-01 1985-08-22 日本電子株式会社 電子線装置

Also Published As

Publication number Publication date
JPS62184752A (ja) 1987-08-13

Similar Documents

Publication Publication Date Title
US3626184A (en) Detector system for a scanning electron microscope
JP3724949B2 (ja) 基板検査装置およびこれを備えた基板検査システム並びに基板検査方法
US5872358A (en) Scanning electron microscope
JP4176159B2 (ja) 改善された２次電子検出のための磁界を用いた環境制御型ｓｅｍ
JPS6246943B2 (enrdf_load_html_response)
JP4084427B2 (ja) 改善された２次電子検出のための多極界を用いた環境制御型ｓｅｍ
JPH051584B2 (enrdf_load_html_response)
JP2641437B2 (ja) 荷電粒子線装置
US4107527A (en) Ion-emission microanalyzer microscope
JP4150535B2 (ja) 荷電粒子ビーム装置
JPH024441Y2 (enrdf_load_html_response)
JPH04122882A (ja) 荷電粒子測定装置および光強度波形測定装置
JPS63205041A (ja) 電子線装置
KR100711198B1 (ko) 주사형전자현미경
JPS6360496B2 (enrdf_load_html_response)
JPH0341402Y2 (enrdf_load_html_response)
JPS63175325A (ja) 荷電粒子検出装置
JPS58155365A (ja) 二次電子スペクトロメ−タ
JPH04233149A (ja) 試料面分析装置
SU1415205A1 (ru) Устройство дл измерени напр женности электростатического пол
JPH03138844A (ja) イオンマイクロアナライザ
JPH024442Y2 (enrdf_load_html_response)
JPS62167452A (ja) Ｘ線光電子分光装置
JPH0518841Y2 (enrdf_load_html_response)
JPS63102149A (ja) 定量電位測定用スペクトロメータ検出器装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term