JPH0514508Y2 - - Google Patents

Info

Publication number
JPH0514508Y2
JPH0514508Y2 JP1983182640U JP18264083U JPH0514508Y2 JP H0514508 Y2 JPH0514508 Y2 JP H0514508Y2 JP 1983182640 U JP1983182640 U JP 1983182640U JP 18264083 U JP18264083 U JP 18264083U JP H0514508 Y2 JPH0514508 Y2 JP H0514508Y2
Authority
JP
Japan
Prior art keywords
rotor
guide members
casing
semiconductor material
drying device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1983182640U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6090833U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18264083U priority Critical patent/JPS6090833U/ja
Publication of JPS6090833U publication Critical patent/JPS6090833U/ja
Application granted granted Critical
Publication of JPH0514508Y2 publication Critical patent/JPH0514508Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP18264083U 1983-11-25 1983-11-25 半導体材料の水切乾燥装置 Granted JPS6090833U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18264083U JPS6090833U (ja) 1983-11-25 1983-11-25 半導体材料の水切乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18264083U JPS6090833U (ja) 1983-11-25 1983-11-25 半導体材料の水切乾燥装置

Publications (2)

Publication Number Publication Date
JPS6090833U JPS6090833U (ja) 1985-06-21
JPH0514508Y2 true JPH0514508Y2 (enEXAMPLES) 1993-04-19

Family

ID=30395477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18264083U Granted JPS6090833U (ja) 1983-11-25 1983-11-25 半導体材料の水切乾燥装置

Country Status (1)

Country Link
JP (1) JPS6090833U (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069500Y2 (ja) * 1987-10-28 1994-03-09 日本電気株式会社 遠心脱水機

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295167A (en) * 1976-02-06 1977-08-10 Hitachi Ltd Wafer dryer
JPS5324299A (en) * 1976-08-18 1978-03-06 Nec Corp Fm-cw radar
JPS5528549A (en) * 1978-08-19 1980-02-29 Sony Corp Servo circuit

Also Published As

Publication number Publication date
JPS6090833U (ja) 1985-06-21

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