JPH0514504Y2 - - Google Patents

Info

Publication number
JPH0514504Y2
JPH0514504Y2 JP1983038407U JP3840783U JPH0514504Y2 JP H0514504 Y2 JPH0514504 Y2 JP H0514504Y2 JP 1983038407 U JP1983038407 U JP 1983038407U JP 3840783 U JP3840783 U JP 3840783U JP H0514504 Y2 JPH0514504 Y2 JP H0514504Y2
Authority
JP
Japan
Prior art keywords
lower electrode
processing chamber
wafer
heat sensor
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1983038407U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59145029U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3840783U priority Critical patent/JPS59145029U/ja
Publication of JPS59145029U publication Critical patent/JPS59145029U/ja
Application granted granted Critical
Publication of JPH0514504Y2 publication Critical patent/JPH0514504Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP3840783U 1983-03-18 1983-03-18 プラズマｃｖｄ装置 Granted JPS59145029U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3840783U JPS59145029U (ja) 1983-03-18 1983-03-18 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3840783U JPS59145029U (ja) 1983-03-18 1983-03-18 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS59145029U JPS59145029U (ja) 1984-09-28
JPH0514504Y2 true JPH0514504Y2 (enrdf_load_stackoverflow) 1993-04-19

Family

ID=30169076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3840783U Granted JPS59145029U (ja) 1983-03-18 1983-03-18 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS59145029U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5019014U (enrdf_load_stackoverflow) * 1973-06-15 1975-03-03

Also Published As

Publication number Publication date
JPS59145029U (ja) 1984-09-28

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