JPH0513451B2 - - Google Patents

Info

Publication number
JPH0513451B2
JPH0513451B2 JP29119385A JP29119385A JPH0513451B2 JP H0513451 B2 JPH0513451 B2 JP H0513451B2 JP 29119385 A JP29119385 A JP 29119385A JP 29119385 A JP29119385 A JP 29119385A JP H0513451 B2 JPH0513451 B2 JP H0513451B2
Authority
JP
Japan
Prior art keywords
diamond
pressure
diaphragm
single crystal
semiconductor film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP29119385A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62148829A (ja
Inventor
Tamotsu Hatsutori
Kazuhiro Inokuchi
Nobue Ito
Tadashi Hatsutori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soken Inc
Original Assignee
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc filed Critical Nippon Soken Inc
Priority to JP29119385A priority Critical patent/JPS62148829A/ja
Priority to US06/946,478 priority patent/US4768011A/en
Publication of JPS62148829A publication Critical patent/JPS62148829A/ja
Publication of JPH0513451B2 publication Critical patent/JPH0513451B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP29119385A 1985-12-24 1985-12-24 圧力検出器 Granted JPS62148829A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP29119385A JPS62148829A (ja) 1985-12-24 1985-12-24 圧力検出器
US06/946,478 US4768011A (en) 1985-12-24 1986-12-24 Joint structure for diamond body and metallic body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29119385A JPS62148829A (ja) 1985-12-24 1985-12-24 圧力検出器

Publications (2)

Publication Number Publication Date
JPS62148829A JPS62148829A (ja) 1987-07-02
JPH0513451B2 true JPH0513451B2 (enrdf_load_stackoverflow) 1993-02-22

Family

ID=17765661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29119385A Granted JPS62148829A (ja) 1985-12-24 1985-12-24 圧力検出器

Country Status (1)

Country Link
JP (1) JPS62148829A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2796843A1 (en) 2013-04-24 2014-10-29 Yokogawa Electric Corporation Force detection device, and force transducer device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5453628A (en) * 1994-10-12 1995-09-26 Kobe Steel Usa, Inc. Microelectronic diamond capacitive transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2796843A1 (en) 2013-04-24 2014-10-29 Yokogawa Electric Corporation Force detection device, and force transducer device
US9171965B2 (en) 2013-04-24 2015-10-27 Yokogawa Electric Corporation Force detection device, and force transducer device

Also Published As

Publication number Publication date
JPS62148829A (ja) 1987-07-02

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