JPS62148829A - 圧力検出器 - Google Patents
圧力検出器Info
- Publication number
- JPS62148829A JPS62148829A JP29119385A JP29119385A JPS62148829A JP S62148829 A JPS62148829 A JP S62148829A JP 29119385 A JP29119385 A JP 29119385A JP 29119385 A JP29119385 A JP 29119385A JP S62148829 A JPS62148829 A JP S62148829A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- strain
- diamond
- pressure
- semiconductor film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 37
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 34
- 239000010432 diamond Substances 0.000 claims abstract description 34
- 239000013078 crystal Substances 0.000 claims abstract description 22
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 20
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 13
- 229910052737 gold Inorganic materials 0.000 claims description 12
- 239000010931 gold Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 10
- 229910052697 platinum Inorganic materials 0.000 claims description 10
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 239000010936 titanium Substances 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 claims description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000000605 extraction Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29119385A JPS62148829A (ja) | 1985-12-24 | 1985-12-24 | 圧力検出器 |
| US06/946,478 US4768011A (en) | 1985-12-24 | 1986-12-24 | Joint structure for diamond body and metallic body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29119385A JPS62148829A (ja) | 1985-12-24 | 1985-12-24 | 圧力検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62148829A true JPS62148829A (ja) | 1987-07-02 |
| JPH0513451B2 JPH0513451B2 (enrdf_load_stackoverflow) | 1993-02-22 |
Family
ID=17765661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29119385A Granted JPS62148829A (ja) | 1985-12-24 | 1985-12-24 | 圧力検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62148829A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5453628A (en) * | 1994-10-12 | 1995-09-26 | Kobe Steel Usa, Inc. | Microelectronic diamond capacitive transducer |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5761536B2 (ja) | 2013-04-24 | 2015-08-12 | 横河電機株式会社 | 力変換素子 |
-
1985
- 1985-12-24 JP JP29119385A patent/JPS62148829A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5453628A (en) * | 1994-10-12 | 1995-09-26 | Kobe Steel Usa, Inc. | Microelectronic diamond capacitive transducer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513451B2 (enrdf_load_stackoverflow) | 1993-02-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5570811B2 (ja) | 耐熱式ソリッド・ステート圧力センサ | |
| US4322980A (en) | Semiconductor pressure sensor having plural pressure sensitive diaphragms and method | |
| CN111076856B (zh) | 温漂自补偿soi压力传感器 | |
| JP3166015B2 (ja) | 力変換素子およびこれを用いた圧力検出回路 | |
| JPS60501177A (ja) | 圧力センサ | |
| US4768011A (en) | Joint structure for diamond body and metallic body | |
| CN105043643A (zh) | 高温压力传感器及其制作方法 | |
| CN104280186B (zh) | 温漂自补偿soi压力传感器的制备及补偿方法 | |
| JPH049727A (ja) | 容量型圧力センサ | |
| CN109238525A (zh) | 金属薄膜式压力-温度复合传感器及其制作方法 | |
| JPS62148829A (ja) | 圧力検出器 | |
| CN115342954A (zh) | 基于光-机-电-热多物理场耦合的mems耐高温压力传感器 | |
| JPS58731A (ja) | 静電容量式圧力センサ | |
| JPS62148830A (ja) | 圧力検出器 | |
| JPS62151732A (ja) | ダイヤモンド体と金属体の接合構造 | |
| CN113433191B (zh) | 环热式气体传感器及其制备方法 | |
| JPH11194060A (ja) | 圧力検出装置 | |
| JPS633234A (ja) | 圧力検出器 | |
| JPH0745353A (ja) | 圧力センサ内蔵プラグ | |
| JP2861452B2 (ja) | 耐環境性センサー | |
| CN113739950B (zh) | 一种声表面波温度传感器、耐高温封装结构及封装方法 | |
| JPS62291534A (ja) | 圧力検出器 | |
| JPH01235825A (ja) | 圧力センサ | |
| JPS6312178A (ja) | 圧力検出器 | |
| JPH0610641B2 (ja) | 高温流体用圧力センサ |