JPH0510570B2 - - Google Patents
Info
- Publication number
- JPH0510570B2 JPH0510570B2 JP61131185A JP13118586A JPH0510570B2 JP H0510570 B2 JPH0510570 B2 JP H0510570B2 JP 61131185 A JP61131185 A JP 61131185A JP 13118586 A JP13118586 A JP 13118586A JP H0510570 B2 JPH0510570 B2 JP H0510570B2
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- foundation
- air
- proof
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000002955 isolation Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Foundations (AREA)
- Vibration Prevention Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61131185A JPS62288431A (ja) | 1986-06-06 | 1986-06-06 | 防振基礎用ステ−ジ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61131185A JPS62288431A (ja) | 1986-06-06 | 1986-06-06 | 防振基礎用ステ−ジ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62288431A JPS62288431A (ja) | 1987-12-15 |
JPH0510570B2 true JPH0510570B2 (enrdf_load_stackoverflow) | 1993-02-10 |
Family
ID=15052000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61131185A Granted JPS62288431A (ja) | 1986-06-06 | 1986-06-06 | 防振基礎用ステ−ジ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62288431A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100619258B1 (ko) * | 2001-10-29 | 2006-09-01 | 가부시키가이샤 에에스 | 진동흡수장치 및 진동흡수장치의 설치방법 |
-
1986
- 1986-06-06 JP JP61131185A patent/JPS62288431A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62288431A (ja) | 1987-12-15 |
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