JPH0510426B2 - - Google Patents
Info
- Publication number
- JPH0510426B2 JPH0510426B2 JP60179025A JP17902585A JPH0510426B2 JP H0510426 B2 JPH0510426 B2 JP H0510426B2 JP 60179025 A JP60179025 A JP 60179025A JP 17902585 A JP17902585 A JP 17902585A JP H0510426 B2 JPH0510426 B2 JP H0510426B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- hard carbon
- carbon film
- atm
- hardness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60179025A JPS6240375A (ja) | 1985-08-14 | 1985-08-14 | 硬質カ−ボン膜 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60179025A JPS6240375A (ja) | 1985-08-14 | 1985-08-14 | 硬質カ−ボン膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6240375A JPS6240375A (ja) | 1987-02-21 |
JPH0510426B2 true JPH0510426B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-02-09 |
Family
ID=16058796
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60179025A Granted JPS6240375A (ja) | 1985-08-14 | 1985-08-14 | 硬質カ−ボン膜 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6240375A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5275850A (en) * | 1988-04-20 | 1994-01-04 | Hitachi, Ltd. | Process for producing a magnetic disk having a metal containing hard carbon coating by plasma chemical vapor deposition under a negative self bias |
JPH0649645A (ja) * | 1992-07-31 | 1994-02-22 | Yoshida Kogyo Kk <Ykk> | 硬質多層膜形成体およびその製造方法 |
JP2000064047A (ja) * | 1998-06-26 | 2000-02-29 | James A Mclaughlin | ダイヤモンド様炭素(dlc)又は他の真空蒸着被膜を基体に被覆する装置及び方法 |
JP2007320142A (ja) * | 2006-05-31 | 2007-12-13 | Meisho Kiko Kk | ナノインプリント用モールド |
KR102505216B1 (ko) * | 2017-06-08 | 2023-02-28 | 어플라이드 머티어리얼스, 인코포레이티드 | 하드마스크 및 다른 패터닝 응용들을 위한 고밀도 저온 탄소 막들 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60145375A (ja) * | 1984-01-09 | 1985-07-31 | Nippon Telegr & Teleph Corp <Ntt> | Νb膜表面の不動態化処理方法 |
-
1985
- 1985-08-14 JP JP60179025A patent/JPS6240375A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6240375A (ja) | 1987-02-21 |
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