JPH0480845B2 - - Google Patents

Info

Publication number
JPH0480845B2
JPH0480845B2 JP11070384A JP11070384A JPH0480845B2 JP H0480845 B2 JPH0480845 B2 JP H0480845B2 JP 11070384 A JP11070384 A JP 11070384A JP 11070384 A JP11070384 A JP 11070384A JP H0480845 B2 JPH0480845 B2 JP H0480845B2
Authority
JP
Japan
Prior art keywords
reaction
sih
silicon
diethyl ether
general formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11070384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60255613A (ja
Inventor
Masayoshi Ito
Hiroji Myagawa
Toshihiro Abe
Kyogo Koizumi
Noryuki Yanagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP11070384A priority Critical patent/JPS60255613A/ja
Publication of JPS60255613A publication Critical patent/JPS60255613A/ja
Publication of JPH0480845B2 publication Critical patent/JPH0480845B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP11070384A 1984-06-01 1984-06-01 水素化ケイ素の製造方法 Granted JPS60255613A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11070384A JPS60255613A (ja) 1984-06-01 1984-06-01 水素化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11070384A JPS60255613A (ja) 1984-06-01 1984-06-01 水素化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS60255613A JPS60255613A (ja) 1985-12-17
JPH0480845B2 true JPH0480845B2 (cs) 1992-12-21

Family

ID=14542313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11070384A Granted JPS60255613A (ja) 1984-06-01 1984-06-01 水素化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPS60255613A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5604044B2 (ja) * 2009-01-09 2014-10-08 独立行政法人科学技術振興機構 高次シラン組成物および膜付基板の製造方法

Also Published As

Publication number Publication date
JPS60255613A (ja) 1985-12-17

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