JPH0480844B2 - - Google Patents
Info
- Publication number
- JPH0480844B2 JPH0480844B2 JP10646184A JP10646184A JPH0480844B2 JP H0480844 B2 JPH0480844 B2 JP H0480844B2 JP 10646184 A JP10646184 A JP 10646184A JP 10646184 A JP10646184 A JP 10646184A JP H0480844 B2 JPH0480844 B2 JP H0480844B2
- Authority
- JP
- Japan
- Prior art keywords
- general formula
- formula
- positive integer
- sih
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10646184A JPS60251114A (ja) | 1984-05-28 | 1984-05-28 | 水素化ケイ素の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10646184A JPS60251114A (ja) | 1984-05-28 | 1984-05-28 | 水素化ケイ素の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60251114A JPS60251114A (ja) | 1985-12-11 |
| JPH0480844B2 true JPH0480844B2 (cs) | 1992-12-21 |
Family
ID=14434215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10646184A Granted JPS60251114A (ja) | 1984-05-28 | 1984-05-28 | 水素化ケイ素の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60251114A (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6027705A (en) * | 1998-01-08 | 2000-02-22 | Showa Denko K.K. | Method for producing a higher silane |
| US6858196B2 (en) | 2001-07-19 | 2005-02-22 | Asm America, Inc. | Method and apparatus for chemical synthesis |
| JP5604044B2 (ja) * | 2009-01-09 | 2014-10-08 | 独立行政法人科学技術振興機構 | 高次シラン組成物および膜付基板の製造方法 |
-
1984
- 1984-05-28 JP JP10646184A patent/JPS60251114A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60251114A (ja) | 1985-12-11 |
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