JPH0478026B2 - - Google Patents

Info

Publication number
JPH0478026B2
JPH0478026B2 JP58196768A JP19676883A JPH0478026B2 JP H0478026 B2 JPH0478026 B2 JP H0478026B2 JP 58196768 A JP58196768 A JP 58196768A JP 19676883 A JP19676883 A JP 19676883A JP H0478026 B2 JPH0478026 B2 JP H0478026B2
Authority
JP
Japan
Prior art keywords
pressure
gold
semiconductor substrate
vapor deposited
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58196768A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6088479A (ja
Inventor
Hirokazu Hirano
Satoru Oohata
Bunshiro Yamaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58196768A priority Critical patent/JPS6088479A/ja
Publication of JPS6088479A publication Critical patent/JPS6088479A/ja
Publication of JPH0478026B2 publication Critical patent/JPH0478026B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP58196768A 1983-10-20 1983-10-20 半導体圧力変換器 Granted JPS6088479A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58196768A JPS6088479A (ja) 1983-10-20 1983-10-20 半導体圧力変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58196768A JPS6088479A (ja) 1983-10-20 1983-10-20 半導体圧力変換器

Publications (2)

Publication Number Publication Date
JPS6088479A JPS6088479A (ja) 1985-05-18
JPH0478026B2 true JPH0478026B2 (enExample) 1992-12-10

Family

ID=16363296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58196768A Granted JPS6088479A (ja) 1983-10-20 1983-10-20 半導体圧力変換器

Country Status (1)

Country Link
JP (1) JPS6088479A (enExample)

Also Published As

Publication number Publication date
JPS6088479A (ja) 1985-05-18

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