JPH0477710B2 - - Google Patents
Info
- Publication number
- JPH0477710B2 JPH0477710B2 JP62220437A JP22043787A JPH0477710B2 JP H0477710 B2 JPH0477710 B2 JP H0477710B2 JP 62220437 A JP62220437 A JP 62220437A JP 22043787 A JP22043787 A JP 22043787A JP H0477710 B2 JPH0477710 B2 JP H0477710B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- thermal plasma
- nozzle
- diamond
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010432 diamond Substances 0.000 claims description 51
- 239000007789 gas Substances 0.000 claims description 46
- 229910003460 diamond Inorganic materials 0.000 claims description 45
- 239000000758 substrate Substances 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 21
- 230000015572 biosynthetic process Effects 0.000 claims description 17
- 239000012808 vapor phase Substances 0.000 claims description 15
- 150000001722 carbon compounds Chemical class 0.000 claims description 13
- 239000001257 hydrogen Substances 0.000 claims description 13
- 229910052739 hydrogen Inorganic materials 0.000 claims description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 12
- 238000003786 synthesis reaction Methods 0.000 claims description 12
- 238000010891 electric arc Methods 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 7
- 230000001590 oxidative effect Effects 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 229930195733 hydrocarbon Natural products 0.000 claims description 6
- 150000002430 hydrocarbons Chemical class 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 238000001308 synthesis method Methods 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 229910001868 water Inorganic materials 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000004215 Carbon black (E152) Substances 0.000 claims 4
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010494 dissociation reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000001237 Raman spectrum Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 208000018459 dissociative disease Diseases 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 1
- 238000000441 X-ray spectroscopy Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- -1 as shown in Fig. 3 Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000007542 hardness measurement Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000002065 inelastic X-ray scattering Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62220437A JPS6433096A (en) | 1987-04-03 | 1987-09-04 | Gaseous phase synthesis for diamond |
EP88302836A EP0286306B1 (en) | 1987-04-03 | 1988-03-30 | Method and apparatus for vapor deposition of diamond |
DE88302836T DE3884653T2 (de) | 1987-04-03 | 1988-03-30 | Verfahren und Vorrichtung zur Gasphasenabscheidung von Diamant. |
SU884355493A RU2032765C1 (ru) | 1987-04-03 | 1988-04-01 | Способ нанесения алмазного покрытия из паровой фазы и устройство для его осуществления |
KR1019880003737A KR910006784B1 (ko) | 1987-04-03 | 1988-04-02 | 다이어몬드 증착장치와 방법 |
US07/177,504 US5368897A (en) | 1987-04-03 | 1988-04-04 | Method for arc discharge plasma vapor deposition of diamond |
US07/905,226 US5403399A (en) | 1987-04-03 | 1992-06-29 | Method and apparatus for vapor deposition of diamond |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8331887 | 1987-04-03 | ||
JP62220437A JPS6433096A (en) | 1987-04-03 | 1987-09-04 | Gaseous phase synthesis for diamond |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6433096A JPS6433096A (en) | 1989-02-02 |
JPH0477710B2 true JPH0477710B2 (ko) | 1992-12-09 |
Family
ID=26424365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62220437A Granted JPS6433096A (en) | 1987-04-03 | 1987-09-04 | Gaseous phase synthesis for diamond |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6433096A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2019035438A1 (ja) * | 2017-08-15 | 2020-09-03 | 住友電気工業株式会社 | 固体炭素含有材料加工体、その製造方法およびその製造装置 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1990005701A1 (en) * | 1988-11-16 | 1990-05-31 | Andrew Carey Good | Diamond production |
US5356672A (en) * | 1990-05-09 | 1994-10-18 | Jet Process Corporation | Method for microwave plasma assisted supersonic gas jet deposition of thin films |
US5256205A (en) * | 1990-05-09 | 1993-10-26 | Jet Process Corporation | Microwave plasma assisted supersonic gas jet deposition of thin film materials |
JP2938552B2 (ja) * | 1990-10-17 | 1999-08-23 | 富士通株式会社 | コーティング膜の製造方法およびコーティング膜の製造装置 |
JP2840699B2 (ja) * | 1990-12-12 | 1998-12-24 | 株式会社 半導体エネルギー研究所 | 被膜形成装置及び被膜形成方法 |
EP0491521B1 (en) * | 1990-12-15 | 1997-03-12 | Fujitsu Limited | Process for producing diamond film |
US5356673A (en) * | 1991-03-18 | 1994-10-18 | Jet Process Corporation | Evaporation system and method for gas jet deposition of thin film materials |
US5565249A (en) * | 1992-05-07 | 1996-10-15 | Fujitsu Limited | Method for producing diamond by a DC plasma jet |
US5571332A (en) * | 1995-02-10 | 1996-11-05 | Jet Process Corporation | Electron jet vapor deposition system |
CN102015529B (zh) * | 2008-02-28 | 2014-04-30 | 巴斯夫欧洲公司 | 纳米石墨片和组合物 |
US9217195B2 (en) | 2011-04-20 | 2015-12-22 | Ntn Corporation | Amorphous carbon film and method for forming same |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5930709A (ja) * | 1982-08-13 | 1984-02-18 | Toa Nenryo Kogyo Kk | 炭素膜及び/又は炭素粒子の製造方法 |
JPS60118693A (ja) * | 1983-11-25 | 1985-06-26 | Mitsubishi Metal Corp | ダイヤモンドの低圧合成方法 |
JPS60127299A (ja) * | 1983-12-14 | 1985-07-06 | Sumitomo Electric Ind Ltd | ダイヤモンドの気相合成法 |
JPS61183198A (ja) * | 1984-12-29 | 1986-08-15 | Kyocera Corp | ダイヤモンド膜の製法 |
JPS61222915A (ja) * | 1985-03-29 | 1986-10-03 | Asahi Chem Ind Co Ltd | ダイヤモンドの気相合成方法 |
JPS62158195A (ja) * | 1985-12-27 | 1987-07-14 | Natl Inst For Res In Inorg Mater | ダイヤモンドの合成法 |
-
1987
- 1987-09-04 JP JP62220437A patent/JPS6433096A/ja active Granted
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5930709A (ja) * | 1982-08-13 | 1984-02-18 | Toa Nenryo Kogyo Kk | 炭素膜及び/又は炭素粒子の製造方法 |
JPS60118693A (ja) * | 1983-11-25 | 1985-06-26 | Mitsubishi Metal Corp | ダイヤモンドの低圧合成方法 |
JPS60127299A (ja) * | 1983-12-14 | 1985-07-06 | Sumitomo Electric Ind Ltd | ダイヤモンドの気相合成法 |
JPS61183198A (ja) * | 1984-12-29 | 1986-08-15 | Kyocera Corp | ダイヤモンド膜の製法 |
JPS61222915A (ja) * | 1985-03-29 | 1986-10-03 | Asahi Chem Ind Co Ltd | ダイヤモンドの気相合成方法 |
JPS62158195A (ja) * | 1985-12-27 | 1987-07-14 | Natl Inst For Res In Inorg Mater | ダイヤモンドの合成法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2019035438A1 (ja) * | 2017-08-15 | 2020-09-03 | 住友電気工業株式会社 | 固体炭素含有材料加工体、その製造方法およびその製造装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6433096A (en) | 1989-02-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR910006784B1 (ko) | 다이어몬드 증착장치와 방법 | |
KR960006263B1 (ko) | 기판면상에 다이아몬드를 증착시키는 장치 및 방법 | |
JPH0477710B2 (ko) | ||
US5314540A (en) | Apparatus for forming diamond film | |
RU2032765C1 (ru) | Способ нанесения алмазного покрытия из паровой фазы и устройство для его осуществления | |
JPH01242141A (ja) | 高気圧マイクロ波プラズマ反応装置 | |
JPH01179789A (ja) | ダイヤモンドの気相成長方法と熱プラズマ堆積方法およびプラズマ噴射装置 | |
JPH0372038B2 (ko) | ||
JP2646439B2 (ja) | ダイヤモンドの気相合成方法および装置 | |
JPH0449517B2 (ko) | ||
JP2646438B2 (ja) | ダイヤモンド気相合成方法 | |
JPH01100092A (ja) | ダイヤモンドの気相合成方法及び装置 | |
JPH0226895A (ja) | ダイヤモンド気相合成方法及びその装置 | |
JP2633640B2 (ja) | ダイヤモンドの気相合成方法 | |
RU2788258C1 (ru) | Газоструйный способ осаждения алмазных пленок с активацией в плазме свч разряда | |
JPH0255295A (ja) | ダイヤモンドの気相合成装置およびダイヤモンドの気相合成方法 | |
JPH01239090A (ja) | ダイヤモンド熱プラズマ気相合成方法及び装置 | |
JP3039880B2 (ja) | 炭素膜形成方法 | |
JPS63310795A (ja) | マイクロ波プラズマジェットによるダイヤモンド気相合成方法 | |
JPH0449520B2 (ko) | ||
JPH0674199B2 (ja) | ダイヤモンドの合成方法 | |
JPH01201481A (ja) | 高圧相窒化ほう素の気相合成方法及び装置 | |
JPH06280019A (ja) | ダイヤモンド状炭素薄膜の製造方法 | |
JPH02160695A (ja) | ダイヤモンドの気相合成法 | |
JPS6265997A (ja) | ダイヤモンド合成方法およびその装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071209 Year of fee payment: 15 |