JPH0477710B2 - - Google Patents

Info

Publication number
JPH0477710B2
JPH0477710B2 JP62220437A JP22043787A JPH0477710B2 JP H0477710 B2 JPH0477710 B2 JP H0477710B2 JP 62220437 A JP62220437 A JP 62220437A JP 22043787 A JP22043787 A JP 22043787A JP H0477710 B2 JPH0477710 B2 JP H0477710B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62220437A
Other versions
JPS6433096A (en
Inventor
Kazuaki Kurihara
Kenichi Sasaki
Motonobu Kawarada
Nagaaki Etsuno
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP8331887 priority Critical
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62220437A priority patent/JPH0477710B2/ja
Priority claimed from DE88302836A external-priority patent/DE3884653D1/en
Priority claimed from SU884355493A external-priority patent/RU2032765C1/en
Publication of JPS6433096A publication Critical patent/JPS6433096A/en
Publication of JPH0477710B2 publication Critical patent/JPH0477710B2/ja
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

JP62220437A 1987-04-03 1987-09-04 Expired - Lifetime JPH0477710B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8331887 1987-04-03
JP62220437A JPH0477710B2 (en) 1987-04-03 1987-09-04

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP62220437A JPH0477710B2 (en) 1987-04-03 1987-09-04
DE88302836A DE3884653D1 (en) 1987-04-03 1988-03-30 Method and apparatus for vapor deposition of diamond.
DE88302836T DE3884653T2 (en) 1987-04-03 1988-03-30 Method and apparatus for vapor deposition of diamond.
EP88302836A EP0286306B1 (en) 1987-04-03 1988-03-30 Method and apparatus for vapor deposition of diamond
SU884355493A RU2032765C1 (en) 1987-04-03 1988-04-01 Method of diamond coating application from vapor phase and a device for it realization
KR8803737A KR910006784B1 (en) 1987-04-03 1988-04-02 Method and apparatus for vapor deposition of diamond
US07/177,504 US5368897A (en) 1987-04-03 1988-04-04 Method for arc discharge plasma vapor deposition of diamond
US07/905,226 US5403399A (en) 1987-04-03 1992-06-29 Method and apparatus for vapor deposition of diamond

Publications (2)

Publication Number Publication Date
JPS6433096A JPS6433096A (en) 1989-02-02
JPH0477710B2 true JPH0477710B2 (en) 1992-12-09

Family

ID=26424365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62220437A Expired - Lifetime JPH0477710B2 (en) 1987-04-03 1987-09-04

Country Status (1)

Country Link
JP (1) JPH0477710B2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990005701A1 (en) * 1988-11-16 1990-05-31 Andrew Carey Good Diamond production
US5256205A (en) * 1990-05-09 1993-10-26 Jet Process Corporation Microwave plasma assisted supersonic gas jet deposition of thin film materials
US5356672A (en) * 1990-05-09 1994-10-18 Jet Process Corporation Method for microwave plasma assisted supersonic gas jet deposition of thin films
JP2938552B2 (en) * 1990-10-17 1999-08-23 富士通株式会社 Manufacturing device manufacturing method and a coating film of the coating film
JP2840699B2 (en) * 1990-12-12 1998-12-24 株式会社 半導体エネルギー研究所 Film forming apparatus and film forming method
DE69125118T2 (en) * 1990-12-15 1997-06-19 Fujitsu Ltd A method of manufacturing a diamond-coating
US5356673A (en) * 1991-03-18 1994-10-18 Jet Process Corporation Evaporation system and method for gas jet deposition of thin film materials
US5565249A (en) * 1992-05-07 1996-10-15 Fujitsu Limited Method for producing diamond by a DC plasma jet
US5571332A (en) * 1995-02-10 1996-11-05 Jet Process Corporation Electron jet vapor deposition system
CN102015529B (en) * 2008-02-28 2014-04-30 巴斯夫欧洲公司 Graphite nanoplatelets and compositions
JP5904537B2 (en) * 2011-04-20 2016-04-13 Ntn株式会社 Method for forming amorphous carbon film

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930709A (en) * 1982-08-13 1984-02-18 Toa Nenryo Kogyo Kk Method for synthesizing carbon film and carbon granule in vapor phase
JPS60118693A (en) * 1983-11-25 1985-06-26 Mitsubishi Metal Corp Method for synthesizing diamond under low pressure
JPS60127299A (en) * 1983-12-14 1985-07-06 Sumitomo Electric Ind Ltd Gas-phase synthesis of diamond
JPS61183198A (en) * 1984-12-29 1986-08-15 Kyocera Corp Production of diamond film
JPS61222915A (en) * 1985-03-29 1986-10-03 Asahi Chem Ind Co Ltd Vapor-phase synthesis of diamond
JPS62158195A (en) * 1985-12-27 1987-07-14 Natl Inst For Res In Inorg Mater Synthesizing method of diamond

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930709A (en) * 1982-08-13 1984-02-18 Toa Nenryo Kogyo Kk Method for synthesizing carbon film and carbon granule in vapor phase
JPS60118693A (en) * 1983-11-25 1985-06-26 Mitsubishi Metal Corp Method for synthesizing diamond under low pressure
JPS60127299A (en) * 1983-12-14 1985-07-06 Sumitomo Electric Ind Ltd Gas-phase synthesis of diamond
JPS61183198A (en) * 1984-12-29 1986-08-15 Kyocera Corp Production of diamond film
JPS61222915A (en) * 1985-03-29 1986-10-03 Asahi Chem Ind Co Ltd Vapor-phase synthesis of diamond
JPS62158195A (en) * 1985-12-27 1987-07-14 Natl Inst For Res In Inorg Mater Synthesizing method of diamond

Also Published As

Publication number Publication date
JPS6433096A (en) 1989-02-02

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