JPH0477465B2 - - Google Patents

Info

Publication number
JPH0477465B2
JPH0477465B2 JP63295817A JP29581788A JPH0477465B2 JP H0477465 B2 JPH0477465 B2 JP H0477465B2 JP 63295817 A JP63295817 A JP 63295817A JP 29581788 A JP29581788 A JP 29581788A JP H0477465 B2 JPH0477465 B2 JP H0477465B2
Authority
JP
Japan
Prior art keywords
wafer
wafers
wafer cassette
imaging
absence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63295817A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02142157A (ja
Inventor
Takeo Nashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON EMU AARU SHII KK
Original Assignee
NIPPON EMU AARU SHII KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON EMU AARU SHII KK filed Critical NIPPON EMU AARU SHII KK
Priority to JP63295817A priority Critical patent/JPH02142157A/ja
Publication of JPH02142157A publication Critical patent/JPH02142157A/ja
Publication of JPH0477465B2 publication Critical patent/JPH0477465B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP63295817A 1988-11-22 1988-11-22 ウェハーの有無・傾き判別装置 Granted JPH02142157A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63295817A JPH02142157A (ja) 1988-11-22 1988-11-22 ウェハーの有無・傾き判別装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63295817A JPH02142157A (ja) 1988-11-22 1988-11-22 ウェハーの有無・傾き判別装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2299678A Division JPH03163847A (ja) 1990-11-05 1990-11-05 ウェハーの位置決め装置

Publications (2)

Publication Number Publication Date
JPH02142157A JPH02142157A (ja) 1990-05-31
JPH0477465B2 true JPH0477465B2 (enExample) 1992-12-08

Family

ID=17825551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63295817A Granted JPH02142157A (ja) 1988-11-22 1988-11-22 ウェハーの有無・傾き判別装置

Country Status (1)

Country Link
JP (1) JPH02142157A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225691A (en) * 1992-05-18 1993-07-06 Avalon Engineering, Inc. Semiconductor wafer cassette mapper with emitter and detector arrays for slot interrogation
US6636626B1 (en) 1999-11-30 2003-10-21 Wafermasters, Inc. Wafer mapping apparatus and method
WO2003100725A1 (en) * 2000-12-01 2003-12-04 Wafermasters, Incorporated Wafer mapping apparatus and method
JP4632590B2 (ja) * 2001-08-30 2011-02-16 キヤノンアネルバ株式会社 基板搬送システム及び基板処理装置
JP7346839B2 (ja) * 2019-02-15 2023-09-20 Tdk株式会社 ロードポート

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57109352A (en) * 1980-12-26 1982-07-07 Toshiba Corp Position sensing apparatus
JPS59175740A (ja) * 1983-03-25 1984-10-04 Telmec Co Ltd ウエハ検出装置
JPS60157230A (ja) * 1984-01-11 1985-08-17 Telmec Co Ltd 半導体ウエハ搬送方法
JPS60257121A (ja) * 1984-06-01 1985-12-18 Fujitsu Ltd 半導体ウエハ検知方法
JPS6171383A (ja) * 1984-09-17 1986-04-12 Canon Inc ウエハ位置検出装置

Also Published As

Publication number Publication date
JPH02142157A (ja) 1990-05-31

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