JPH0475776B2 - - Google Patents

Info

Publication number
JPH0475776B2
JPH0475776B2 JP13406786A JP13406786A JPH0475776B2 JP H0475776 B2 JPH0475776 B2 JP H0475776B2 JP 13406786 A JP13406786 A JP 13406786A JP 13406786 A JP13406786 A JP 13406786A JP H0475776 B2 JPH0475776 B2 JP H0475776B2
Authority
JP
Japan
Prior art keywords
rotating shaft
discharge electrode
vacuum container
sheet
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13406786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62289233A (ja
Inventor
Motoyasu Koyama
Hideaki Teraoka
Takao Akagi
Shinji Yamaguchi
Itsuki Sakamoto
Akira Nanba
Isao Okagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP13406786A priority Critical patent/JPS62289233A/ja
Priority to KR870004997A priority patent/KR880000215A/ko
Priority to US07/058,858 priority patent/US4803332A/en
Priority to CN87104097A priority patent/CN1015614B/zh
Priority to DE87108331T priority patent/DE3788160T2/de
Priority to EP87108331A priority patent/EP0249198B1/en
Publication of JPS62289233A publication Critical patent/JPS62289233A/ja
Publication of JPH0475776B2 publication Critical patent/JPH0475776B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP13406786A 1986-06-10 1986-06-10 シ−ト状物のプラズマ処理装置 Granted JPS62289233A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP13406786A JPS62289233A (ja) 1986-06-10 1986-06-10 シ−ト状物のプラズマ処理装置
KR870004997A KR880000215A (ko) 1986-06-10 1987-05-20 시이트(sheet)상 물체의 플라즈마 처리장치
US07/058,858 US4803332A (en) 1986-06-10 1987-06-05 Apparatus for plasma treatment of a sheet-like structure
CN87104097A CN1015614B (zh) 1986-06-10 1987-06-09 薄状物等离子体处理装置
DE87108331T DE3788160T2 (de) 1986-06-10 1987-06-10 Plasmabehandlungsvorrichtung.
EP87108331A EP0249198B1 (en) 1986-06-10 1987-06-10 Plasma treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13406786A JPS62289233A (ja) 1986-06-10 1986-06-10 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS62289233A JPS62289233A (ja) 1987-12-16
JPH0475776B2 true JPH0475776B2 (cg-RX-API-DMAC7.html) 1992-12-01

Family

ID=15119600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13406786A Granted JPS62289233A (ja) 1986-06-10 1986-06-10 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS62289233A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS62289233A (ja) 1987-12-16

Similar Documents

Publication Publication Date Title
US3959104A (en) Electrode structure for generating electrical discharge plasma
JP5324596B2 (ja) 巻取式真空処理装置
JPS58148659A (ja) 電磁ポンプ
CN87104097A (zh) 薄状物等离子体处理装置
JP3585578B2 (ja) プラズマ処理装置
JPS62136596A (ja) 金属ウエブへの連続電解処理装置
JP5317162B2 (ja) プラズマ装置、プラズマ処理装置及びプラズマ処理方法
CN110462756A (zh) 三相同轴超导电缆
JP3667651B2 (ja) 弾性及び断熱性を備えたローラ及びこれを用いた加熱装置
JPH0475776B2 (cg-RX-API-DMAC7.html)
JP4667337B2 (ja) 管状カソードを有するスパッタ装置およびこのスパッタ装置の操作方法
JP3850547B2 (ja) 真空炉における給電方式
JPH0475777B2 (cg-RX-API-DMAC7.html)
JP3236493B2 (ja) 複合被覆電線の製造方法
JPH0527455B2 (cg-RX-API-DMAC7.html)
JPH043771B2 (cg-RX-API-DMAC7.html)
JPH0443101B2 (cg-RX-API-DMAC7.html)
JPH07220895A (ja) 大気圧グロ−放電用電極及び該電極を使用したプラズマ処理方法
JPH0443102B2 (cg-RX-API-DMAC7.html)
CN112941612A (zh) 一种用于提高腐蚀铝箔腐蚀性能的腐蚀装置
JPH0357146B2 (cg-RX-API-DMAC7.html)
US5235151A (en) Induction-heated godet
JP2576590B2 (ja) オゾン反応器
JP5981323B2 (ja) オゾン発生装置
JP2618301B2 (ja) 通電加熱装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees