JPH0472390B2 - - Google Patents
Info
- Publication number
- JPH0472390B2 JPH0472390B2 JP2417705A JP41770590A JPH0472390B2 JP H0472390 B2 JPH0472390 B2 JP H0472390B2 JP 2417705 A JP2417705 A JP 2417705A JP 41770590 A JP41770590 A JP 41770590A JP H0472390 B2 JPH0472390 B2 JP H0472390B2
- Authority
- JP
- Japan
- Prior art keywords
- type
- region
- epitaxial layer
- collector
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009792 diffusion process Methods 0.000 claims description 40
- 238000002955 isolation Methods 0.000 claims description 22
- 239000012535 impurity Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000000605 extraction Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Bipolar Transistors (AREA)
- Element Separation (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2417705A JPH03245562A (ja) | 1983-04-19 | 1990-12-14 | 半導体集積回路 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58068534A JPS59194465A (ja) | 1983-04-19 | 1983-04-19 | 半導体集積回路の製造方法 |
| JP2417705A JPH03245562A (ja) | 1983-04-19 | 1990-12-14 | 半導体集積回路 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58068534A Division JPS59194465A (ja) | 1983-04-19 | 1983-04-19 | 半導体集積回路の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03245562A JPH03245562A (ja) | 1991-11-01 |
| JPH0472390B2 true JPH0472390B2 (enrdf_load_stackoverflow) | 1992-11-18 |
Family
ID=26409753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2417705A Granted JPH03245562A (ja) | 1983-04-19 | 1990-12-14 | 半導体集積回路 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03245562A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19906384A1 (de) * | 1999-02-16 | 2000-08-24 | Siemens Ag | IGBT mit PN-Isolation |
-
1990
- 1990-12-14 JP JP2417705A patent/JPH03245562A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03245562A (ja) | 1991-11-01 |