JPH0470732U - - Google Patents

Info

Publication number
JPH0470732U
JPH0470732U JP11354690U JP11354690U JPH0470732U JP H0470732 U JPH0470732 U JP H0470732U JP 11354690 U JP11354690 U JP 11354690U JP 11354690 U JP11354690 U JP 11354690U JP H0470732 U JPH0470732 U JP H0470732U
Authority
JP
Japan
Prior art keywords
pattern
reduction
projection exposure
measurement
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11354690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11354690U priority Critical patent/JPH0470732U/ja
Publication of JPH0470732U publication Critical patent/JPH0470732U/ja
Pending legal-status Critical Current

Links

JP11354690U 1990-10-31 1990-10-31 Pending JPH0470732U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11354690U JPH0470732U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-31 1990-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11354690U JPH0470732U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-31 1990-10-31

Publications (1)

Publication Number Publication Date
JPH0470732U true JPH0470732U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-06-23

Family

ID=31861147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11354690U Pending JPH0470732U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-31 1990-10-31

Country Status (1)

Country Link
JP (1) JPH0470732U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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