JPH0468574B2 - - Google Patents

Info

Publication number
JPH0468574B2
JPH0468574B2 JP16617587A JP16617587A JPH0468574B2 JP H0468574 B2 JPH0468574 B2 JP H0468574B2 JP 16617587 A JP16617587 A JP 16617587A JP 16617587 A JP16617587 A JP 16617587A JP H0468574 B2 JPH0468574 B2 JP H0468574B2
Authority
JP
Japan
Prior art keywords
vibrating
epitaxial layer
silicon substrate
silicon
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16617587A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6410138A (en
Inventor
Kyoichi Ikeda
Tetsuya Watanabe
Hideki Kuwayama
Takashi Kobayashi
Sunao Nishikawa
Takashi Yoshida
Kinji Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP16617587A priority Critical patent/JPS6410138A/ja
Publication of JPS6410138A publication Critical patent/JPS6410138A/ja
Publication of JPH0468574B2 publication Critical patent/JPH0468574B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP16617587A 1987-07-02 1987-07-02 Manufacture of vibration type transducer Granted JPS6410138A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16617587A JPS6410138A (en) 1987-07-02 1987-07-02 Manufacture of vibration type transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16617587A JPS6410138A (en) 1987-07-02 1987-07-02 Manufacture of vibration type transducer

Publications (2)

Publication Number Publication Date
JPS6410138A JPS6410138A (en) 1989-01-13
JPH0468574B2 true JPH0468574B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-11-02

Family

ID=15826467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16617587A Granted JPS6410138A (en) 1987-07-02 1987-07-02 Manufacture of vibration type transducer

Country Status (1)

Country Link
JP (1) JPS6410138A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6410138A (en) 1989-01-13

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