JPS6410138A - Manufacture of vibration type transducer - Google Patents
Manufacture of vibration type transducerInfo
- Publication number
- JPS6410138A JPS6410138A JP16617587A JP16617587A JPS6410138A JP S6410138 A JPS6410138 A JP S6410138A JP 16617587 A JP16617587 A JP 16617587A JP 16617587 A JP16617587 A JP 16617587A JP S6410138 A JPS6410138 A JP S6410138A
- Authority
- JP
- Japan
- Prior art keywords
- type
- epitaxial layer
- groove
- substrate
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16617587A JPS6410138A (en) | 1987-07-02 | 1987-07-02 | Manufacture of vibration type transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16617587A JPS6410138A (en) | 1987-07-02 | 1987-07-02 | Manufacture of vibration type transducer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6410138A true JPS6410138A (en) | 1989-01-13 |
JPH0468574B2 JPH0468574B2 (ja) | 1992-11-02 |
Family
ID=15826467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16617587A Granted JPS6410138A (en) | 1987-07-02 | 1987-07-02 | Manufacture of vibration type transducer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6410138A (ja) |
-
1987
- 1987-07-02 JP JP16617587A patent/JPS6410138A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0468574B2 (ja) | 1992-11-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071102 Year of fee payment: 15 |