JPH0467907B2 - - Google Patents

Info

Publication number
JPH0467907B2
JPH0467907B2 JP20486686A JP20486686A JPH0467907B2 JP H0467907 B2 JPH0467907 B2 JP H0467907B2 JP 20486686 A JP20486686 A JP 20486686A JP 20486686 A JP20486686 A JP 20486686A JP H0467907 B2 JPH0467907 B2 JP H0467907B2
Authority
JP
Japan
Prior art keywords
pixel
defect
light
output
pixels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20486686A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6361149A (ja
Inventor
Shuji Oonaka
Haruhisa Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
NEC Corp
Original Assignee
Toto Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd, Nippon Electric Co Ltd filed Critical Toto Ltd
Priority to JP20486686A priority Critical patent/JPS6361149A/ja
Publication of JPS6361149A publication Critical patent/JPS6361149A/ja
Publication of JPH0467907B2 publication Critical patent/JPH0467907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
JP20486686A 1986-08-31 1986-08-31 表面欠陥検出方式 Granted JPS6361149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20486686A JPS6361149A (ja) 1986-08-31 1986-08-31 表面欠陥検出方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20486686A JPS6361149A (ja) 1986-08-31 1986-08-31 表面欠陥検出方式

Publications (2)

Publication Number Publication Date
JPS6361149A JPS6361149A (ja) 1988-03-17
JPH0467907B2 true JPH0467907B2 (enrdf_load_stackoverflow) 1992-10-29

Family

ID=16497697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20486686A Granted JPS6361149A (ja) 1986-08-31 1986-08-31 表面欠陥検出方式

Country Status (1)

Country Link
JP (1) JPS6361149A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5283642A (en) * 1992-03-16 1994-02-01 The Boeing Company Scratch measurement apparatus and method

Also Published As

Publication number Publication date
JPS6361149A (ja) 1988-03-17

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