JPS6361149A - 表面欠陥検出方式 - Google Patents

表面欠陥検出方式

Info

Publication number
JPS6361149A
JPS6361149A JP20486686A JP20486686A JPS6361149A JP S6361149 A JPS6361149 A JP S6361149A JP 20486686 A JP20486686 A JP 20486686A JP 20486686 A JP20486686 A JP 20486686A JP S6361149 A JPS6361149 A JP S6361149A
Authority
JP
Japan
Prior art keywords
pixel
defect
circuit
flaw
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20486686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0467907B2 (enrdf_load_stackoverflow
Inventor
Shuji Onaka
大仲　周次
Haruhisa Kudo
晴久 工藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
NEC Corp
Original Assignee
Toto Ltd
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd, NEC Corp filed Critical Toto Ltd
Priority to JP20486686A priority Critical patent/JPS6361149A/ja
Publication of JPS6361149A publication Critical patent/JPS6361149A/ja
Publication of JPH0467907B2 publication Critical patent/JPH0467907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
JP20486686A 1986-08-31 1986-08-31 表面欠陥検出方式 Granted JPS6361149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20486686A JPS6361149A (ja) 1986-08-31 1986-08-31 表面欠陥検出方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20486686A JPS6361149A (ja) 1986-08-31 1986-08-31 表面欠陥検出方式

Publications (2)

Publication Number Publication Date
JPS6361149A true JPS6361149A (ja) 1988-03-17
JPH0467907B2 JPH0467907B2 (enrdf_load_stackoverflow) 1992-10-29

Family

ID=16497697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20486686A Granted JPS6361149A (ja) 1986-08-31 1986-08-31 表面欠陥検出方式

Country Status (1)

Country Link
JP (1) JPS6361149A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5283642A (en) * 1992-03-16 1994-02-01 The Boeing Company Scratch measurement apparatus and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5283642A (en) * 1992-03-16 1994-02-01 The Boeing Company Scratch measurement apparatus and method

Also Published As

Publication number Publication date
JPH0467907B2 (enrdf_load_stackoverflow) 1992-10-29

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