JPH0467740B2 - - Google Patents

Info

Publication number
JPH0467740B2
JPH0467740B2 JP27634086A JP27634086A JPH0467740B2 JP H0467740 B2 JPH0467740 B2 JP H0467740B2 JP 27634086 A JP27634086 A JP 27634086A JP 27634086 A JP27634086 A JP 27634086A JP H0467740 B2 JPH0467740 B2 JP H0467740B2
Authority
JP
Japan
Prior art keywords
scanning
pattern
deflection
pitch
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP27634086A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63131451A (ja
Inventor
Yoichi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP27634086A priority Critical patent/JPS63131451A/ja
Publication of JPS63131451A publication Critical patent/JPS63131451A/ja
Publication of JPH0467740B2 publication Critical patent/JPH0467740B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP27634086A 1986-11-19 1986-11-19 材料検査装置 Granted JPS63131451A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27634086A JPS63131451A (ja) 1986-11-19 1986-11-19 材料検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27634086A JPS63131451A (ja) 1986-11-19 1986-11-19 材料検査装置

Publications (2)

Publication Number Publication Date
JPS63131451A JPS63131451A (ja) 1988-06-03
JPH0467740B2 true JPH0467740B2 (enrdf_load_stackoverflow) 1992-10-29

Family

ID=17568072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27634086A Granted JPS63131451A (ja) 1986-11-19 1986-11-19 材料検査装置

Country Status (1)

Country Link
JP (1) JPS63131451A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63131451A (ja) 1988-06-03

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