JPS6139728B2 - - Google Patents

Info

Publication number
JPS6139728B2
JPS6139728B2 JP52040938A JP4093877A JPS6139728B2 JP S6139728 B2 JPS6139728 B2 JP S6139728B2 JP 52040938 A JP52040938 A JP 52040938A JP 4093877 A JP4093877 A JP 4093877A JP S6139728 B2 JPS6139728 B2 JP S6139728B2
Authority
JP
Japan
Prior art keywords
electron beam
distance
scanning
pattern
moving distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52040938A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53126597A (en
Inventor
Tadahiro Takigawa
Masahiko Washimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP4093877A priority Critical patent/JPS53126597A/ja
Publication of JPS53126597A publication Critical patent/JPS53126597A/ja
Publication of JPS6139728B2 publication Critical patent/JPS6139728B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4093877A 1977-04-12 1977-04-12 Electron ray exposing device Granted JPS53126597A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4093877A JPS53126597A (en) 1977-04-12 1977-04-12 Electron ray exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4093877A JPS53126597A (en) 1977-04-12 1977-04-12 Electron ray exposing device

Publications (2)

Publication Number Publication Date
JPS53126597A JPS53126597A (en) 1978-11-04
JPS6139728B2 true JPS6139728B2 (enrdf_load_stackoverflow) 1986-09-05

Family

ID=12594433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4093877A Granted JPS53126597A (en) 1977-04-12 1977-04-12 Electron ray exposing device

Country Status (1)

Country Link
JP (1) JPS53126597A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568624A (en) * 1978-11-18 1980-05-23 Toshiba Corp Electron beam drawing unit
JP2008266858A (ja) * 2007-04-25 2008-11-06 Toyo Bussan Kogyo Kk ヘルメット用カードホルダ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3900737A (en) * 1974-04-18 1975-08-19 Bell Telephone Labor Inc Electron beam exposure system

Also Published As

Publication number Publication date
JPS53126597A (en) 1978-11-04

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