JPS53126597A - Electron ray exposing device - Google Patents

Electron ray exposing device

Info

Publication number
JPS53126597A
JPS53126597A JP4093877A JP4093877A JPS53126597A JP S53126597 A JPS53126597 A JP S53126597A JP 4093877 A JP4093877 A JP 4093877A JP 4093877 A JP4093877 A JP 4093877A JP S53126597 A JPS53126597 A JP S53126597A
Authority
JP
Japan
Prior art keywords
exposing device
electron ray
ray exposing
electron
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4093877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6139728B2 (enrdf_load_stackoverflow
Inventor
Tadahiro Takigawa
Masahiko Washimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP4093877A priority Critical patent/JPS53126597A/ja
Publication of JPS53126597A publication Critical patent/JPS53126597A/ja
Publication of JPS6139728B2 publication Critical patent/JPS6139728B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4093877A 1977-04-12 1977-04-12 Electron ray exposing device Granted JPS53126597A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4093877A JPS53126597A (en) 1977-04-12 1977-04-12 Electron ray exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4093877A JPS53126597A (en) 1977-04-12 1977-04-12 Electron ray exposing device

Publications (2)

Publication Number Publication Date
JPS53126597A true JPS53126597A (en) 1978-11-04
JPS6139728B2 JPS6139728B2 (enrdf_load_stackoverflow) 1986-09-05

Family

ID=12594433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4093877A Granted JPS53126597A (en) 1977-04-12 1977-04-12 Electron ray exposing device

Country Status (1)

Country Link
JP (1) JPS53126597A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568624A (en) * 1978-11-18 1980-05-23 Toshiba Corp Electron beam drawing unit
JP2008266858A (ja) * 2007-04-25 2008-11-06 Toyo Bussan Kogyo Kk ヘルメット用カードホルダ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145865A (enrdf_load_stackoverflow) * 1974-04-18 1975-11-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145865A (enrdf_load_stackoverflow) * 1974-04-18 1975-11-22

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568624A (en) * 1978-11-18 1980-05-23 Toshiba Corp Electron beam drawing unit
JP2008266858A (ja) * 2007-04-25 2008-11-06 Toyo Bussan Kogyo Kk ヘルメット用カードホルダ

Also Published As

Publication number Publication date
JPS6139728B2 (enrdf_load_stackoverflow) 1986-09-05

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