JPS5435680A - Device for exposing electron beam - Google Patents

Device for exposing electron beam

Info

Publication number
JPS5435680A
JPS5435680A JP10188477A JP10188477A JPS5435680A JP S5435680 A JPS5435680 A JP S5435680A JP 10188477 A JP10188477 A JP 10188477A JP 10188477 A JP10188477 A JP 10188477A JP S5435680 A JPS5435680 A JP S5435680A
Authority
JP
Japan
Prior art keywords
electron beam
exposing electron
exposing
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10188477A
Other languages
Japanese (ja)
Other versions
JPS5428270B2 (en
Inventor
Mamoru Nakasuji
Toshiaki Shinozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP10188477A priority Critical patent/JPS5435680A/en
Publication of JPS5435680A publication Critical patent/JPS5435680A/en
Publication of JPS5428270B2 publication Critical patent/JPS5428270B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP10188477A 1977-08-25 1977-08-25 Device for exposing electron beam Granted JPS5435680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10188477A JPS5435680A (en) 1977-08-25 1977-08-25 Device for exposing electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10188477A JPS5435680A (en) 1977-08-25 1977-08-25 Device for exposing electron beam

Publications (2)

Publication Number Publication Date
JPS5435680A true JPS5435680A (en) 1979-03-15
JPS5428270B2 JPS5428270B2 (en) 1979-09-14

Family

ID=14312353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10188477A Granted JPS5435680A (en) 1977-08-25 1977-08-25 Device for exposing electron beam

Country Status (1)

Country Link
JP (1) JPS5435680A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56103423A (en) * 1979-12-17 1981-08-18 Western Electric Co Charged particle beam high speed scanner
JPS56162832A (en) * 1980-03-31 1981-12-15 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam device and electron beam exposing method
JPS5731133A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Drawing device by electron beam
JPS5739536A (en) * 1980-08-20 1982-03-04 Matsushita Electronics Corp Method of electron beam exposure
JPS63138605A (en) * 1986-11-29 1988-06-10 日立フェライト株式会社 Dielectric ceramic composition for microwave

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56103423A (en) * 1979-12-17 1981-08-18 Western Electric Co Charged particle beam high speed scanner
JPH0316775B2 (en) * 1979-12-17 1991-03-06 Ei Teii Ando Teii Tekunorojiizu Inc
JPS56162832A (en) * 1980-03-31 1981-12-15 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam device and electron beam exposing method
JPS6214090B2 (en) * 1980-03-31 1987-03-31 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai
JPS5731133A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Drawing device by electron beam
JPS5739536A (en) * 1980-08-20 1982-03-04 Matsushita Electronics Corp Method of electron beam exposure
JPH0334646B2 (en) * 1980-08-20 1991-05-23 Matsushita Denshi Kogyo Kk
JPS63138605A (en) * 1986-11-29 1988-06-10 日立フェライト株式会社 Dielectric ceramic composition for microwave

Also Published As

Publication number Publication date
JPS5428270B2 (en) 1979-09-14

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