JPS544573A - Device for exposing electron beam - Google Patents

Device for exposing electron beam

Info

Publication number
JPS544573A
JPS544573A JP6963277A JP6963277A JPS544573A JP S544573 A JPS544573 A JP S544573A JP 6963277 A JP6963277 A JP 6963277A JP 6963277 A JP6963277 A JP 6963277A JP S544573 A JPS544573 A JP S544573A
Authority
JP
Japan
Prior art keywords
electron beam
exposing electron
exposing
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6963277A
Other languages
Japanese (ja)
Other versions
JPS5424831B2 (en
Inventor
Mamoru Nakasuji
Tadahiro Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYUU ERU ESU AI GIJIYUTSU KE
Original Assignee
CHIYUU ERU ESU AI GIJIYUTSU KE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYUU ERU ESU AI GIJIYUTSU KE filed Critical CHIYUU ERU ESU AI GIJIYUTSU KE
Priority to JP6963277A priority Critical patent/JPS544573A/en
Publication of JPS544573A publication Critical patent/JPS544573A/en
Publication of JPS5424831B2 publication Critical patent/JPS5424831B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP6963277A 1977-06-13 1977-06-13 Device for exposing electron beam Granted JPS544573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6963277A JPS544573A (en) 1977-06-13 1977-06-13 Device for exposing electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6963277A JPS544573A (en) 1977-06-13 1977-06-13 Device for exposing electron beam

Publications (2)

Publication Number Publication Date
JPS544573A true JPS544573A (en) 1979-01-13
JPS5424831B2 JPS5424831B2 (en) 1979-08-23

Family

ID=13408419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6963277A Granted JPS544573A (en) 1977-06-13 1977-06-13 Device for exposing electron beam

Country Status (1)

Country Link
JP (1) JPS544573A (en)

Also Published As

Publication number Publication date
JPS5424831B2 (en) 1979-08-23

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