JPS545663A - Device for exposing electron beam - Google Patents

Device for exposing electron beam

Info

Publication number
JPS545663A
JPS545663A JP7062777A JP7062777A JPS545663A JP S545663 A JPS545663 A JP S545663A JP 7062777 A JP7062777 A JP 7062777A JP 7062777 A JP7062777 A JP 7062777A JP S545663 A JPS545663 A JP S545663A
Authority
JP
Japan
Prior art keywords
electron beam
exposing electron
exposing
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7062777A
Other languages
Japanese (ja)
Other versions
JPS5413755B2 (en
Inventor
Mamoru Nakasuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP7062777A priority Critical patent/JPS545663A/en
Publication of JPS545663A publication Critical patent/JPS545663A/en
Publication of JPS5413755B2 publication Critical patent/JPS5413755B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP7062777A 1977-06-15 1977-06-15 Device for exposing electron beam Granted JPS545663A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7062777A JPS545663A (en) 1977-06-15 1977-06-15 Device for exposing electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7062777A JPS545663A (en) 1977-06-15 1977-06-15 Device for exposing electron beam

Publications (2)

Publication Number Publication Date
JPS545663A true JPS545663A (en) 1979-01-17
JPS5413755B2 JPS5413755B2 (en) 1979-06-01

Family

ID=13437044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7062777A Granted JPS545663A (en) 1977-06-15 1977-06-15 Device for exposing electron beam

Country Status (1)

Country Link
JP (1) JPS545663A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610926A (en) * 1979-07-06 1981-02-03 Hitachi Ltd Electron beam drawing device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183789A (en) * 1983-04-01 1984-10-18 株式会社勝見商会 Needle rod drive apparatus of embroidering machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610926A (en) * 1979-07-06 1981-02-03 Hitachi Ltd Electron beam drawing device
JPS6161251B2 (en) * 1979-07-06 1986-12-24 Hitachi Ltd

Also Published As

Publication number Publication date
JPS5413755B2 (en) 1979-06-01

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