JPS545663A - Device for exposing electron beam - Google Patents
Device for exposing electron beamInfo
- Publication number
- JPS545663A JPS545663A JP7062777A JP7062777A JPS545663A JP S545663 A JPS545663 A JP S545663A JP 7062777 A JP7062777 A JP 7062777A JP 7062777 A JP7062777 A JP 7062777A JP S545663 A JPS545663 A JP S545663A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposing electron
- exposing
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7062777A JPS545663A (en) | 1977-06-15 | 1977-06-15 | Device for exposing electron beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7062777A JPS545663A (en) | 1977-06-15 | 1977-06-15 | Device for exposing electron beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS545663A true JPS545663A (en) | 1979-01-17 |
JPS5413755B2 JPS5413755B2 (en) | 1979-06-01 |
Family
ID=13437044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7062777A Granted JPS545663A (en) | 1977-06-15 | 1977-06-15 | Device for exposing electron beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS545663A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5610926A (en) * | 1979-07-06 | 1981-02-03 | Hitachi Ltd | Electron beam drawing device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59183789A (en) * | 1983-04-01 | 1984-10-18 | 株式会社勝見商会 | Needle rod drive apparatus of embroidering machine |
-
1977
- 1977-06-15 JP JP7062777A patent/JPS545663A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5610926A (en) * | 1979-07-06 | 1981-02-03 | Hitachi Ltd | Electron beam drawing device |
JPS6161251B2 (en) * | 1979-07-06 | 1986-12-24 | Hitachi Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS5413755B2 (en) | 1979-06-01 |
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