JPS53125697A - Electron ray exposing method - Google Patents

Electron ray exposing method

Info

Publication number
JPS53125697A
JPS53125697A JP4115877A JP4115877A JPS53125697A JP S53125697 A JPS53125697 A JP S53125697A JP 4115877 A JP4115877 A JP 4115877A JP 4115877 A JP4115877 A JP 4115877A JP S53125697 A JPS53125697 A JP S53125697A
Authority
JP
Japan
Prior art keywords
electron ray
exposing method
ray exposing
electron
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4115877A
Other languages
Japanese (ja)
Other versions
JPS5738185B2 (en
Inventor
Tetsuo Yuasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP4115877A priority Critical patent/JPS53125697A/en
Publication of JPS53125697A publication Critical patent/JPS53125697A/en
Publication of JPS5738185B2 publication Critical patent/JPS5738185B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4115877A 1977-04-11 1977-04-11 Electron ray exposing method Granted JPS53125697A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4115877A JPS53125697A (en) 1977-04-11 1977-04-11 Electron ray exposing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4115877A JPS53125697A (en) 1977-04-11 1977-04-11 Electron ray exposing method

Publications (2)

Publication Number Publication Date
JPS53125697A true JPS53125697A (en) 1978-11-02
JPS5738185B2 JPS5738185B2 (en) 1982-08-13

Family

ID=12600603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4115877A Granted JPS53125697A (en) 1977-04-11 1977-04-11 Electron ray exposing method

Country Status (1)

Country Link
JP (1) JPS53125697A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539692A (en) * 1978-09-14 1980-03-19 Sanyo Electric Co Ltd Scanning method of electron beam

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113683A (en) * 1976-03-19 1977-09-22 Nec Corp Electron beam stabilizing time control circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113683A (en) * 1976-03-19 1977-09-22 Nec Corp Electron beam stabilizing time control circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539692A (en) * 1978-09-14 1980-03-19 Sanyo Electric Co Ltd Scanning method of electron beam

Also Published As

Publication number Publication date
JPS5738185B2 (en) 1982-08-13

Similar Documents

Publication Publication Date Title
DE2862123D1 (en) Electron beam exposure apparatus
JPS5498076A (en) Electron shielding tube
JPS5463681A (en) Electron beam exposure device
GB2006809B (en) Electron detector devices
GB2011125B (en) Apparatus for electron beam lithograhy
GB1537641A (en) Envelope assemblies
GB2001470B (en) Electron tube
EP0031579A3 (en) Electron beam apparatus
DE3063103D1 (en) Electron beam exposure method
JPS5410662A (en) Shadow mask crt
JPS5419356A (en) Shadow mask crt
JPS5418667A (en) Shadow mask crt
JPS53121574A (en) Electron beam exposing device
JPS5468149A (en) Electron ray application device
JPS53124078A (en) Electron beam device
GB2002952B (en) Cathode-ray tubes
JPS5471989A (en) Method of developing electron ray resist
JPS5435680A (en) Device for exposing electron beam
JPS53125697A (en) Electron ray exposing method
JPS53119496A (en) Electron ray expososing method
JPS53126597A (en) Electron ray exposing device
GB1542193A (en) Cathode-ray tube screening exposure method
GB2001193B (en) Cathode ray tubes
JPS54163670A (en) Electron ray device
AU3974378A (en) Envelope assemblies