JPS53125697A - Electron ray exposing method - Google Patents
Electron ray exposing methodInfo
- Publication number
- JPS53125697A JPS53125697A JP4115877A JP4115877A JPS53125697A JP S53125697 A JPS53125697 A JP S53125697A JP 4115877 A JP4115877 A JP 4115877A JP 4115877 A JP4115877 A JP 4115877A JP S53125697 A JPS53125697 A JP S53125697A
- Authority
- JP
- Japan
- Prior art keywords
- electron ray
- exposing method
- ray exposing
- electron
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4115877A JPS53125697A (en) | 1977-04-11 | 1977-04-11 | Electron ray exposing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4115877A JPS53125697A (en) | 1977-04-11 | 1977-04-11 | Electron ray exposing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53125697A true JPS53125697A (en) | 1978-11-02 |
JPS5738185B2 JPS5738185B2 (en) | 1982-08-13 |
Family
ID=12600603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4115877A Granted JPS53125697A (en) | 1977-04-11 | 1977-04-11 | Electron ray exposing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53125697A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5539692A (en) * | 1978-09-14 | 1980-03-19 | Sanyo Electric Co Ltd | Scanning method of electron beam |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52113683A (en) * | 1976-03-19 | 1977-09-22 | Nec Corp | Electron beam stabilizing time control circuit |
-
1977
- 1977-04-11 JP JP4115877A patent/JPS53125697A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52113683A (en) * | 1976-03-19 | 1977-09-22 | Nec Corp | Electron beam stabilizing time control circuit |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5539692A (en) * | 1978-09-14 | 1980-03-19 | Sanyo Electric Co Ltd | Scanning method of electron beam |
Also Published As
Publication number | Publication date |
---|---|
JPS5738185B2 (en) | 1982-08-13 |
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