JPS54163670A - Electron ray device - Google Patents
Electron ray deviceInfo
- Publication number
- JPS54163670A JPS54163670A JP7257378A JP7257378A JPS54163670A JP S54163670 A JPS54163670 A JP S54163670A JP 7257378 A JP7257378 A JP 7257378A JP 7257378 A JP7257378 A JP 7257378A JP S54163670 A JPS54163670 A JP S54163670A
- Authority
- JP
- Japan
- Prior art keywords
- ray device
- electron ray
- electron
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7257378A JPS54163670A (en) | 1978-06-15 | 1978-06-15 | Electron ray device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7257378A JPS54163670A (en) | 1978-06-15 | 1978-06-15 | Electron ray device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54163670A true JPS54163670A (en) | 1979-12-26 |
Family
ID=13493245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7257378A Pending JPS54163670A (en) | 1978-06-15 | 1978-06-15 | Electron ray device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54163670A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5945848U (en) * | 1982-09-18 | 1984-03-27 | 日本電子株式会社 | Exhaust operation display device for vacuum equipment |
JPS60129064U (en) * | 1984-02-07 | 1985-08-29 | 日本電子株式会社 | electronic microscope |
JP2016177926A (en) * | 2015-03-19 | 2016-10-06 | 日本電子株式会社 | Electron microscope and control method |
-
1978
- 1978-06-15 JP JP7257378A patent/JPS54163670A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5945848U (en) * | 1982-09-18 | 1984-03-27 | 日本電子株式会社 | Exhaust operation display device for vacuum equipment |
JPS60129064U (en) * | 1984-02-07 | 1985-08-29 | 日本電子株式会社 | electronic microscope |
JPH0238366Y2 (en) * | 1984-02-07 | 1990-10-16 | ||
JP2016177926A (en) * | 2015-03-19 | 2016-10-06 | 日本電子株式会社 | Electron microscope and control method |
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