JPS54163670A - Electron ray device - Google Patents

Electron ray device

Info

Publication number
JPS54163670A
JPS54163670A JP7257378A JP7257378A JPS54163670A JP S54163670 A JPS54163670 A JP S54163670A JP 7257378 A JP7257378 A JP 7257378A JP 7257378 A JP7257378 A JP 7257378A JP S54163670 A JPS54163670 A JP S54163670A
Authority
JP
Japan
Prior art keywords
ray device
electron ray
electron
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7257378A
Other languages
Japanese (ja)
Inventor
Youichi Obara
Sakuyoshi Moriguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP7257378A priority Critical patent/JPS54163670A/en
Publication of JPS54163670A publication Critical patent/JPS54163670A/en
Pending legal-status Critical Current

Links

JP7257378A 1978-06-15 1978-06-15 Electron ray device Pending JPS54163670A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7257378A JPS54163670A (en) 1978-06-15 1978-06-15 Electron ray device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7257378A JPS54163670A (en) 1978-06-15 1978-06-15 Electron ray device

Publications (1)

Publication Number Publication Date
JPS54163670A true JPS54163670A (en) 1979-12-26

Family

ID=13493245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7257378A Pending JPS54163670A (en) 1978-06-15 1978-06-15 Electron ray device

Country Status (1)

Country Link
JP (1) JPS54163670A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945848U (en) * 1982-09-18 1984-03-27 日本電子株式会社 Exhaust operation display device for vacuum equipment
JPS60129064U (en) * 1984-02-07 1985-08-29 日本電子株式会社 electronic microscope
JP2016177926A (en) * 2015-03-19 2016-10-06 日本電子株式会社 Electron microscope and control method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945848U (en) * 1982-09-18 1984-03-27 日本電子株式会社 Exhaust operation display device for vacuum equipment
JPS60129064U (en) * 1984-02-07 1985-08-29 日本電子株式会社 electronic microscope
JPH0238366Y2 (en) * 1984-02-07 1990-10-16
JP2016177926A (en) * 2015-03-19 2016-10-06 日本電子株式会社 Electron microscope and control method

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