JPS60129064U - electronic microscope - Google Patents

electronic microscope

Info

Publication number
JPS60129064U
JPS60129064U JP1565384U JP1565384U JPS60129064U JP S60129064 U JPS60129064 U JP S60129064U JP 1565384 U JP1565384 U JP 1565384U JP 1565384 U JP1565384 U JP 1565384U JP S60129064 U JPS60129064 U JP S60129064U
Authority
JP
Japan
Prior art keywords
electron
electronic microscope
electron microscope
electron beam
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1565384U
Other languages
Japanese (ja)
Other versions
JPH0238366Y2 (en
Inventor
平田　義弘
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP1565384U priority Critical patent/JPS60129064U/en
Publication of JPS60129064U publication Critical patent/JPS60129064U/en
Application granted granted Critical
Publication of JPH0238366Y2 publication Critical patent/JPH0238366Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例装置を示す略図、第２図は第
１図の装置の要部を示す略図、第３図は操作パネルの略
図、第４図、第５図、第６図Ａ及び第６図Ｂは本考案装
置によって図形表示される電子線偏向系及び電子レン女
系の動作状態の例示である。Fig. 1 is a schematic diagram showing an embodiment of the device of the present invention, Fig. 2 is a schematic diagram showing the main parts of the device in Fig. 1, Fig. 3 is a schematic diagram of the operation panel, Figs. 4, 5, and 6. Figures A and 6B are illustrations of the operating states of the electron beam deflection system and the electron beam system graphically displayed by the device of the present invention.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 電子顕微鏡に設けられた表示手段へ、該電子顕微鏡の電
子線偏向系の動作状態又は電子レンズ系による観察モー
ドを電子線の軌跡と共に図形表示するよう構成したこと
を特徴とする電子顕微鏡。1. An electron microscope characterized in that the operating state of an electron beam deflection system of the electron microscope or the observation mode by an electron lens system is graphically displayed along with the locus of the electron beam on a display means provided in the electron microscope.
JP1565384U 1984-02-07 1984-02-07 electronic microscope Granted JPS60129064U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1565384U JPS60129064U (en) 1984-02-07 1984-02-07 electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1565384U JPS60129064U (en) 1984-02-07 1984-02-07 electronic microscope

Publications (2)

Publication Number Publication Date
JPS60129064U true JPS60129064U (en) 1985-08-29
JPH0238366Y2 JPH0238366Y2 (en) 1990-10-16

Family

ID=30501691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1565384U Granted JPS60129064U (en) 1984-02-07 1984-02-07 electronic microscope

Country Status (1)

Country Link
JP (1) JPS60129064U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017179137A1 (en) * 2016-04-13 2017-10-19 株式会社 日立ハイテクノロジーズ Charged particle beam device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163670A (en) * 1978-06-15 1979-12-26 Nippon Electron Optics Lab Electron ray device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163670A (en) * 1978-06-15 1979-12-26 Nippon Electron Optics Lab Electron ray device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017179137A1 (en) * 2016-04-13 2017-10-19 株式会社 日立ハイテクノロジーズ Charged particle beam device
JPWO2017179137A1 (en) * 2016-04-13 2018-10-18 株式会社日立ハイテクノロジーズ Charged particle beam equipment

Also Published As

Publication number Publication date
JPH0238366Y2 (en) 1990-10-16

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