JPS52113683A - Electron beam stabilizing time control circuit - Google Patents

Electron beam stabilizing time control circuit

Info

Publication number
JPS52113683A
JPS52113683A JP2925676A JP2925676A JPS52113683A JP S52113683 A JPS52113683 A JP S52113683A JP 2925676 A JP2925676 A JP 2925676A JP 2925676 A JP2925676 A JP 2925676A JP S52113683 A JPS52113683 A JP S52113683A
Authority
JP
Japan
Prior art keywords
electron beam
control circuit
time control
stabilizing time
beam stabilizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2925676A
Other languages
Japanese (ja)
Other versions
JPS5334467B2 (en
Inventor
Nobumasa Watanabe
Yoshiyasu Kikuchi
Yoshihiro Kasuya
Tomoki Shiyudo
Akihira Fujinami
Kiichi Takamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2925676A priority Critical patent/JPS52113683A/en
Publication of JPS52113683A publication Critical patent/JPS52113683A/en
Publication of JPS5334467B2 publication Critical patent/JPS5334467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To reduce pattern drawing time by so controlling the X-component and Y-component of the moving distance of an electron beam that the time proportional to the larger one out of these queues as stable time.
COPYRIGHT: (C)1977,JPO&Japio
JP2925676A 1976-03-19 1976-03-19 Electron beam stabilizing time control circuit Granted JPS52113683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2925676A JPS52113683A (en) 1976-03-19 1976-03-19 Electron beam stabilizing time control circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2925676A JPS52113683A (en) 1976-03-19 1976-03-19 Electron beam stabilizing time control circuit

Publications (2)

Publication Number Publication Date
JPS52113683A true JPS52113683A (en) 1977-09-22
JPS5334467B2 JPS5334467B2 (en) 1978-09-20

Family

ID=12271186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2925676A Granted JPS52113683A (en) 1976-03-19 1976-03-19 Electron beam stabilizing time control circuit

Country Status (1)

Country Link
JP (1) JPS52113683A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53125697A (en) * 1977-04-11 1978-11-02 Nippon Electron Optics Lab Electron ray exposing method
JPS559447A (en) * 1978-07-06 1980-01-23 Jeol Ltd Electron ray exposure device
JPS5539692A (en) * 1978-09-14 1980-03-19 Sanyo Electric Co Ltd Scanning method of electron beam

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53125697A (en) * 1977-04-11 1978-11-02 Nippon Electron Optics Lab Electron ray exposing method
JPS5738185B2 (en) * 1977-04-11 1982-08-13
JPS559447A (en) * 1978-07-06 1980-01-23 Jeol Ltd Electron ray exposure device
JPS6231489B2 (en) * 1978-07-06 1987-07-08 Nippon Electron Optics Lab
JPS5539692A (en) * 1978-09-14 1980-03-19 Sanyo Electric Co Ltd Scanning method of electron beam

Also Published As

Publication number Publication date
JPS5334467B2 (en) 1978-09-20

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