JPS52113683A - Electron beam stabilizing time control circuit - Google Patents
Electron beam stabilizing time control circuitInfo
- Publication number
- JPS52113683A JPS52113683A JP2925676A JP2925676A JPS52113683A JP S52113683 A JPS52113683 A JP S52113683A JP 2925676 A JP2925676 A JP 2925676A JP 2925676 A JP2925676 A JP 2925676A JP S52113683 A JPS52113683 A JP S52113683A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- control circuit
- time control
- stabilizing time
- beam stabilizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To reduce pattern drawing time by so controlling the X-component and Y-component of the moving distance of an electron beam that the time proportional to the larger one out of these queues as stable time.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2925676A JPS52113683A (en) | 1976-03-19 | 1976-03-19 | Electron beam stabilizing time control circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2925676A JPS52113683A (en) | 1976-03-19 | 1976-03-19 | Electron beam stabilizing time control circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52113683A true JPS52113683A (en) | 1977-09-22 |
JPS5334467B2 JPS5334467B2 (en) | 1978-09-20 |
Family
ID=12271186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2925676A Granted JPS52113683A (en) | 1976-03-19 | 1976-03-19 | Electron beam stabilizing time control circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52113683A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53125697A (en) * | 1977-04-11 | 1978-11-02 | Nippon Electron Optics Lab | Electron ray exposing method |
JPS559447A (en) * | 1978-07-06 | 1980-01-23 | Jeol Ltd | Electron ray exposure device |
JPS5539692A (en) * | 1978-09-14 | 1980-03-19 | Sanyo Electric Co Ltd | Scanning method of electron beam |
-
1976
- 1976-03-19 JP JP2925676A patent/JPS52113683A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53125697A (en) * | 1977-04-11 | 1978-11-02 | Nippon Electron Optics Lab | Electron ray exposing method |
JPS5738185B2 (en) * | 1977-04-11 | 1982-08-13 | ||
JPS559447A (en) * | 1978-07-06 | 1980-01-23 | Jeol Ltd | Electron ray exposure device |
JPS6231489B2 (en) * | 1978-07-06 | 1987-07-08 | Nippon Electron Optics Lab | |
JPS5539692A (en) * | 1978-09-14 | 1980-03-19 | Sanyo Electric Co Ltd | Scanning method of electron beam |
Also Published As
Publication number | Publication date |
---|---|
JPS5334467B2 (en) | 1978-09-20 |
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