JPS53119497A - Electron ray exposing device - Google Patents
Electron ray exposing deviceInfo
- Publication number
- JPS53119497A JPS53119497A JP3414377A JP3414377A JPS53119497A JP S53119497 A JPS53119497 A JP S53119497A JP 3414377 A JP3414377 A JP 3414377A JP 3414377 A JP3414377 A JP 3414377A JP S53119497 A JPS53119497 A JP S53119497A
- Authority
- JP
- Japan
- Prior art keywords
- exposing device
- electron ray
- ray exposing
- electron
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3414377A JPS53119497A (en) | 1977-03-28 | 1977-03-28 | Electron ray exposing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3414377A JPS53119497A (en) | 1977-03-28 | 1977-03-28 | Electron ray exposing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53119497A true JPS53119497A (en) | 1978-10-18 |
Family
ID=12405976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3414377A Pending JPS53119497A (en) | 1977-03-28 | 1977-03-28 | Electron ray exposing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53119497A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50145865A (en) * | 1974-04-18 | 1975-11-22 |
-
1977
- 1977-03-28 JP JP3414377A patent/JPS53119497A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50145865A (en) * | 1974-04-18 | 1975-11-22 |
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