JPS53119497A - Electron ray exposing device - Google Patents

Electron ray exposing device

Info

Publication number
JPS53119497A
JPS53119497A JP3414377A JP3414377A JPS53119497A JP S53119497 A JPS53119497 A JP S53119497A JP 3414377 A JP3414377 A JP 3414377A JP 3414377 A JP3414377 A JP 3414377A JP S53119497 A JPS53119497 A JP S53119497A
Authority
JP
Japan
Prior art keywords
exposing device
electron ray
ray exposing
electron
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3414377A
Other languages
Japanese (ja)
Inventor
Tetsuo Yuasa
Hitoshi Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP3414377A priority Critical patent/JPS53119497A/en
Publication of JPS53119497A publication Critical patent/JPS53119497A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP3414377A 1977-03-28 1977-03-28 Electron ray exposing device Pending JPS53119497A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3414377A JPS53119497A (en) 1977-03-28 1977-03-28 Electron ray exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3414377A JPS53119497A (en) 1977-03-28 1977-03-28 Electron ray exposing device

Publications (1)

Publication Number Publication Date
JPS53119497A true JPS53119497A (en) 1978-10-18

Family

ID=12405976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3414377A Pending JPS53119497A (en) 1977-03-28 1977-03-28 Electron ray exposing device

Country Status (1)

Country Link
JP (1) JPS53119497A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145865A (en) * 1974-04-18 1975-11-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145865A (en) * 1974-04-18 1975-11-22

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