JPH0464815B2 - - Google Patents

Info

Publication number
JPH0464815B2
JPH0464815B2 JP60085268A JP8526885A JPH0464815B2 JP H0464815 B2 JPH0464815 B2 JP H0464815B2 JP 60085268 A JP60085268 A JP 60085268A JP 8526885 A JP8526885 A JP 8526885A JP H0464815 B2 JPH0464815 B2 JP H0464815B2
Authority
JP
Japan
Prior art keywords
substrate drum
thin strip
fluid actuator
presser band
strip plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60085268A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61244435A (ja
Inventor
Isao Yamada
Takeo Kaneko
Hideo Tsufuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ORIENTO SOGYO KK
TOKYO SEIMITSU SOKUKI KK
Original Assignee
ORIENTO SOGYO KK
TOKYO SEIMITSU SOKUKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ORIENTO SOGYO KK, TOKYO SEIMITSU SOKUKI KK filed Critical ORIENTO SOGYO KK
Priority to JP60085268A priority Critical patent/JPS61244435A/ja
Publication of JPS61244435A publication Critical patent/JPS61244435A/ja
Publication of JPH0464815B2 publication Critical patent/JPH0464815B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP60085268A 1985-04-19 1985-04-19 薄帯板の保持及び送り装置 Granted JPS61244435A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60085268A JPS61244435A (ja) 1985-04-19 1985-04-19 薄帯板の保持及び送り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60085268A JPS61244435A (ja) 1985-04-19 1985-04-19 薄帯板の保持及び送り装置

Publications (2)

Publication Number Publication Date
JPS61244435A JPS61244435A (ja) 1986-10-30
JPH0464815B2 true JPH0464815B2 (Direct) 1992-10-16

Family

ID=13853823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60085268A Granted JPS61244435A (ja) 1985-04-19 1985-04-19 薄帯板の保持及び送り装置

Country Status (1)

Country Link
JP (1) JPS61244435A (Direct)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2611877B2 (ja) * 1991-02-18 1997-05-21 株式会社ノリタケカンパニーリミテド 極薄金属板の超仕上研磨装置
JP7674065B2 (ja) * 2021-09-29 2025-05-09 東京エレクトロン株式会社 基板保持機構及びこれを用いた基板処理装置、並びに基板交換方法

Also Published As

Publication number Publication date
JPS61244435A (ja) 1986-10-30

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