JPH0464763U - - Google Patents

Info

Publication number
JPH0464763U
JPH0464763U JP10778090U JP10778090U JPH0464763U JP H0464763 U JPH0464763 U JP H0464763U JP 10778090 U JP10778090 U JP 10778090U JP 10778090 U JP10778090 U JP 10778090U JP H0464763 U JPH0464763 U JP H0464763U
Authority
JP
Japan
Prior art keywords
axis
stage
rotatable around
inspected
line sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10778090U
Other languages
English (en)
Japanese (ja)
Other versions
JP2574720Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990107780U priority Critical patent/JP2574720Y2/ja
Publication of JPH0464763U publication Critical patent/JPH0464763U/ja
Application granted granted Critical
Publication of JP2574720Y2 publication Critical patent/JP2574720Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP1990107780U 1990-10-15 1990-10-15 傷検査用光学装置の位置調整装置 Expired - Lifetime JP2574720Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990107780U JP2574720Y2 (ja) 1990-10-15 1990-10-15 傷検査用光学装置の位置調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990107780U JP2574720Y2 (ja) 1990-10-15 1990-10-15 傷検査用光学装置の位置調整装置

Publications (2)

Publication Number Publication Date
JPH0464763U true JPH0464763U (cs) 1992-06-03
JP2574720Y2 JP2574720Y2 (ja) 1998-06-18

Family

ID=31854456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990107780U Expired - Lifetime JP2574720Y2 (ja) 1990-10-15 1990-10-15 傷検査用光学装置の位置調整装置

Country Status (1)

Country Link
JP (1) JP2574720Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006200957A (ja) * 2005-01-19 2006-08-03 Sumitomo Metal Mining Co Ltd 貫通孔検査装置およびこれを用いた貫通孔検査方法
JP2010197240A (ja) * 2009-02-25 2010-09-09 Fuji Electric Systems Co Ltd 粉粒体異物検査装置、異物検査方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172858U (ja) * 1982-05-17 1983-11-18 株式会社日立製作所 光学試料台
JPS63108236A (ja) * 1986-10-10 1988-05-13 エヌ・ベー・フィリップス・フルーイランペンファブリケン 分光楕円偏光計
JPS63142240A (ja) * 1986-12-05 1988-06-14 Fuji Photo Film Co Ltd 表面検査装置
JPS63262530A (ja) * 1987-04-20 1988-10-28 Pioneer Electronic Corp 複屈折測定装置
JPH02116742A (ja) * 1988-10-26 1990-05-01 Yukio Saito ガラス瓶の欠陥検査装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172858U (ja) * 1982-05-17 1983-11-18 株式会社日立製作所 光学試料台
JPS63108236A (ja) * 1986-10-10 1988-05-13 エヌ・ベー・フィリップス・フルーイランペンファブリケン 分光楕円偏光計
JPS63142240A (ja) * 1986-12-05 1988-06-14 Fuji Photo Film Co Ltd 表面検査装置
JPS63262530A (ja) * 1987-04-20 1988-10-28 Pioneer Electronic Corp 複屈折測定装置
JPH02116742A (ja) * 1988-10-26 1990-05-01 Yukio Saito ガラス瓶の欠陥検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006200957A (ja) * 2005-01-19 2006-08-03 Sumitomo Metal Mining Co Ltd 貫通孔検査装置およびこれを用いた貫通孔検査方法
JP2010197240A (ja) * 2009-02-25 2010-09-09 Fuji Electric Systems Co Ltd 粉粒体異物検査装置、異物検査方法

Also Published As

Publication number Publication date
JP2574720Y2 (ja) 1998-06-18

Similar Documents

Publication Publication Date Title
JPH0464763U (cs)
JPS59197812A (ja) 平面の平坦度測定方法
US4560274A (en) Optical alignment for workpiece
JPS6124883Y2 (cs)
JPS59113707U (ja) 鏡面体の表面検査装置
JP2570813B2 (ja) 円弧面変形検査方法
JPS59180413A (ja) 表面欠陥検査方法
JPS6324243B2 (cs)
JPS645152U (cs)
JPS6151257B2 (cs)
JPH01313739A (ja) 円筒体周面検査方法及びその装置
JPH0178938U (cs)
JPH03210461A (ja) レーザ光学系装置
JPS6228155U (cs)
JPS61199661U (cs)
JPS63150610A (ja) 断面形状の測定方法
JPS62129745A (ja) 拡散光照明装置
JPS63135266U (cs)
JPS63167246U (cs)
JPS62199664U (cs)
JPH03130545U (cs)
JPS61286740A (ja) 表面欠陥検査方法
JPH04134057U (ja) 金属パイプの欠陥検査装置
JPS6361111A (ja) 面粗さ測定機
JPS6199043U (cs)