JPH0464763U - - Google Patents

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Publication number
JPH0464763U
JPH0464763U JP10778090U JP10778090U JPH0464763U JP H0464763 U JPH0464763 U JP H0464763U JP 10778090 U JP10778090 U JP 10778090U JP 10778090 U JP10778090 U JP 10778090U JP H0464763 U JPH0464763 U JP H0464763U
Authority
JP
Japan
Prior art keywords
axis
stage
rotatable around
inspected
line sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10778090U
Other languages
Japanese (ja)
Other versions
JP2574720Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990107780U priority Critical patent/JP2574720Y2/en
Publication of JPH0464763U publication Critical patent/JPH0464763U/ja
Application granted granted Critical
Publication of JP2574720Y2 publication Critical patent/JP2574720Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例の斜視図、第２図は
本実施例の要部の動作の説明図、第３図、第４図
は本実施例による位置合せ動作の説明図、第５図
は投光器と被検査体の位置合せがなされていない
状態を示す図、第６図は受光器と被検査体の位置
合せがなされていない状態を示す図、第７図は径
のことなる被検査体の傷検査をする時の投光器お
よび受光器の位置再調整を示す図、第８図、第９
図は、それぞれ、従来の投光器および受光器の位
置調整装置の一例の斜視図である。 １……受光器、２……ラインセンサ、３……縮
小光学系、４，５……ゴニオステージ、６……回
転ステージ、７……Ｚステージ、８……Ｙステー
ジ、９……Ｘステージ、１０……被検査体、１１
……スリツト光、１２……散乱光。 FIG. 1 is a perspective view of an embodiment of the present invention, FIG. 2 is an explanatory diagram of the operation of the main parts of the present embodiment, FIGS. 3 and 4 are explanatory diagrams of the alignment operation according to the present embodiment, Figure 5 shows a state in which the emitter and the object to be inspected are not aligned, Figure 6 shows a state in which the receiver and the object to be inspected are not aligned, and Figure 7 shows the different diameters. Figures 8 and 9 show the readjustment of the position of the emitter and receiver when inspecting the object to be inspected for flaws.
The figures are perspective views of examples of conventional position adjusting devices for a light projector and a light receiver, respectively. 1... Light receiver, 2... Line sensor, 3... Reduction optical system, 4, 5... Goniometer stage, 6... Rotation stage, 7... Z stage, 8... Y stage, 9... X stage , 10...Test object, 11
...Slit light, 12...Scattered light.

Claims (1)

【実用新案登録請求の範囲】 投光器から投射されたライン状光によつて、被
検査体の表面上に存在する欠陥から散乱された光
を受光するラインセンサを備えた傷検査用光学装
置の位置調整装置であつて、 前記被検査体の表面に照射された前記ライン状
光と平行な第１の軸の回りに回動可能な第１のス
テージと、 前記ライン状光と前記第１の軸を含む面に垂直
でかつ該第１の軸を含む面内にあり、該第１の軸
と直交する第２の軸の回りに回動可能な第２のス
テージと、 前記第１および第２の軸に、同一点で直交する
第３の軸の回りに回動可能な第３のステージとを
有し、 前記ラインセンサの中心と、前記第１〜３の軸
の交点が一致するようにしたことを特徴とする傷
検査用光学装置の位置調整装置。[Claims for Utility Model Registration] Position of an optical device for flaw inspection equipped with a line sensor that receives line-shaped light projected from a projector and scattered from defects existing on the surface of an object to be inspected. The adjusting device includes: a first stage rotatable around a first axis parallel to the linear light irradiated onto the surface of the object to be inspected; a second stage that is perpendicular to a plane containing the first axis and within a plane that includes the first axis and is rotatable around a second axis that is perpendicular to the first axis; and a third stage rotatable around a third axis orthogonal to the axis at the same point, such that the center of the line sensor and the intersection of the first to third axes coincide with each other. A position adjustment device for an optical device for flaw inspection, characterized in that:
JP1990107780U 1990-10-15 1990-10-15 Position adjustment device for scratch inspection optical device Expired - Lifetime JP2574720Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990107780U JP2574720Y2 (en) 1990-10-15 1990-10-15 Position adjustment device for scratch inspection optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990107780U JP2574720Y2 (en) 1990-10-15 1990-10-15 Position adjustment device for scratch inspection optical device

Publications (2)

Publication Number Publication Date
JPH0464763U true JPH0464763U (en) 1992-06-03
JP2574720Y2 JP2574720Y2 (en) 1998-06-18

Family

ID=31854456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990107780U Expired - Lifetime JP2574720Y2 (en) 1990-10-15 1990-10-15 Position adjustment device for scratch inspection optical device

Country Status (1)

Country Link
JP (1) JP2574720Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006200957A (en) * 2005-01-19 2006-08-03 Sumitomo Metal Mining Co Ltd Through hole inspection device and through hole inspection method using the same
JP2010197240A (en) * 2009-02-25 2010-09-09 Fuji Electric Systems Co Ltd Particulate foreign material inspecting device, and method of the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172858U (en) * 1982-05-17 1983-11-18 株式会社日立製作所 optical sample stage
JPS63108236A (en) * 1986-10-10 1988-05-13 エヌ・ベー・フィリップス・フルーイランペンファブリケン Spectral ellipsometer
JPS63142240A (en) * 1986-12-05 1988-06-14 Fuji Photo Film Co Ltd Surface inspecting apparatus
JPS63262530A (en) * 1987-04-20 1988-10-28 Pioneer Electronic Corp Measuring apparatus for birefringence
JPH02116742A (en) * 1988-10-26 1990-05-01 Yukio Saito Defect inspector for glass bottle

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172858U (en) * 1982-05-17 1983-11-18 株式会社日立製作所 optical sample stage
JPS63108236A (en) * 1986-10-10 1988-05-13 エヌ・ベー・フィリップス・フルーイランペンファブリケン Spectral ellipsometer
JPS63142240A (en) * 1986-12-05 1988-06-14 Fuji Photo Film Co Ltd Surface inspecting apparatus
JPS63262530A (en) * 1987-04-20 1988-10-28 Pioneer Electronic Corp Measuring apparatus for birefringence
JPH02116742A (en) * 1988-10-26 1990-05-01 Yukio Saito Defect inspector for glass bottle

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006200957A (en) * 2005-01-19 2006-08-03 Sumitomo Metal Mining Co Ltd Through hole inspection device and through hole inspection method using the same
JP2010197240A (en) * 2009-02-25 2010-09-09 Fuji Electric Systems Co Ltd Particulate foreign material inspecting device, and method of the same

Also Published As

Publication number Publication date
JP2574720Y2 (en) 1998-06-18

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