JPS63167246U - - Google Patents
Info
- Publication number
- JPS63167246U JPS63167246U JP6082187U JP6082187U JPS63167246U JP S63167246 U JPS63167246 U JP S63167246U JP 6082187 U JP6082187 U JP 6082187U JP 6082187 U JP6082187 U JP 6082187U JP S63167246 U JPS63167246 U JP S63167246U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- light
- reflected light
- detection device
- defect detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 230000007547 defect Effects 0.000 claims 4
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案装置の一実施例を略示した斜視
図、第２図は第１図−線の矢視図、第３図は
本考案装置における干渉フイルタの特性を示した
説明図、第４図は従来装置を略示した斜視図、第
５図は従来装置における回折パターンを示した説
明図である。
１１……光照射系、１２……レーザ光源、１３
……レンズ系、１４……多面体鏡、２１……受光
検出系、２２……受光器、２３……干渉フイルタ
、２４……検出器、Ａ……被検査物。
FIG. 1 is a perspective view schematically showing an embodiment of the device of the present invention, FIG. 2 is a view taken along the line shown in FIG. 1, and FIG. 3 is an explanatory diagram showing the characteristics of the interference filter in the device of the present invention. FIG. 4 is a perspective view schematically showing a conventional device, and FIG. 5 is an explanatory diagram showing a diffraction pattern in the conventional device. 11...Light irradiation system, 12...Laser light source, 13
... Lens system, 14 ... Polyhedral mirror, 21 ... Light reception and detection system, 22 ... Light receiver, 23 ... Interference filter, 24 ... Detector, A ... Test object.
Claims (1)
照射系と、被検査物表面からの反射光を受光して
被検査物表面の欠陥を検出するための受光検出系
とを備えた被検査物の表面欠陥検出装置において
、上記被検査物の幅方向にわたる受光検出系の受
光器に、乱反射光を遮断して正反射光のみを入射
させるための干渉フイルタが設けられている被検
査物の表面欠陥検出装置。 (2) 干渉フイルタが、そのフイルタ面に対して
垂直に正反射光を入射させるための曲率を有する
実用新案登録請求の範囲第１項記載の被検査物の
表面欠陥検出装置。[Scope of claim for utility model registration] (1) A light irradiation system for irradiating light toward the surface of an object to be inspected, and for detecting defects on the surface of the object by receiving reflected light from the surface of the object to be inspected. In a surface defect detection device for an object to be inspected, which is equipped with a light receiving and detecting system, interference is provided for blocking diffusely reflected light and allowing only specularly reflected light to enter the light receiver of the light receiving and detecting system extending in the width direction of the object to be inspected. A surface defect detection device for inspected objects equipped with a filter. (2) The surface defect detection device for an object to be inspected according to claim 1, in which the interference filter has a curvature to allow specularly reflected light to be incident perpendicularly to the filter surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6082187U JPS63167246U (en) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6082187U JPS63167246U (en) | 1987-04-22 | 1987-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63167246U true JPS63167246U (en) | 1988-10-31 |
Family
ID=30893584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6082187U Pending JPS63167246U (en) | 1987-04-22 | 1987-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63167246U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58204353A (en) * | 1982-05-24 | 1983-11-29 | Kawasaki Steel Corp | Method for detecting flaw on surface of metallic object |
| JPS58214805A (en) * | 1982-06-08 | 1983-12-14 | Toppan Printing Co Ltd | Measuring device of pattern area rate |
-
1987
- 1987-04-22 JP JP6082187U patent/JPS63167246U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58204353A (en) * | 1982-05-24 | 1983-11-29 | Kawasaki Steel Corp | Method for detecting flaw on surface of metallic object |
| JPS58214805A (en) * | 1982-06-08 | 1983-12-14 | Toppan Printing Co Ltd | Measuring device of pattern area rate |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63167246U (en) | ||
| JPS6427648U (en) | ||
| JPS6035883Y2 (en) | detection device | |
| JPS6151257B2 (en) | ||
| JPS62199664U (en) | ||
| JPS62189889U (en) | ||
| JPS63115746U (en) | ||
| JPS6363713U (en) | ||
| JPH03117749U (en) | ||
| JPH0285310U (en) | ||
| JPS61186806A (en) | Fault detecting device for transparent body | |
| JPS62190368U (en) | ||
| JPS63105007U (en) | ||
| JPS5995205U (en) | laser interferometer | |
| JPS6131801B2 (en) | ||
| JPS62195752U (en) | ||
| JPS6199043U (en) | ||
| JPS6358738U (en) | ||
| JPS63145158U (en) | ||
| JPH0416344U (en) | ||
| JPS6167512U (en) | ||
| JPH0252149U (en) | ||
| JPH01137458U (en) | ||
| JPH02133656U (en) | ||
| JPS5913905A (en) | Reflection photodetector |