JPS58172858U - optical sample stage - Google Patents

optical sample stage

Info

Publication number
JPS58172858U
JPS58172858U JP7069482U JP7069482U JPS58172858U JP S58172858 U JPS58172858 U JP S58172858U JP 7069482 U JP7069482 U JP 7069482U JP 7069482 U JP7069482 U JP 7069482U JP S58172858 U JPS58172858 U JP S58172858U
Authority
JP
Japan
Prior art keywords
sample stage
cylinder
sample
axis
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7069482U
Other languages
Japanese (ja)
Inventor
正文 金友
但馬 武
本岡 輝昭
光紀 蕨迫
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP7069482U priority Critical patent/JPS58172858U/en
Publication of JPS58172858U publication Critical patent/JPS58172858U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は偏光解析装置の概略平面図、第2図は従来の偏
光解析装置の試料台の斜視図、第3図は本考案による偏
光解析装置の試料台の斜視図、第4図は本考案による偏
光解析装置の試料台における試料固定部の断面図を示す
。 1・・・・・・光源、4・・・・・・検出器、31・・
・・・・光、32・・・・・・試料、33・・・・・・
試料面、35・・・・・・回転軸、36・・・・・・試
料固定具、37・・・・・・基準面、39・・・・・・
試料台回転中心軸、40・・・・・・円筒体、44・曲
・Y方向移動台、45・・・・・・X方向移動台、47
・・・・・・光入射開口。 %1図 藁 3  図     −
Figure 1 is a schematic plan view of the polarization analyzer, Figure 2 is a perspective view of the sample stage of a conventional polarization analyzer, Figure 3 is a perspective view of the sample stage of the polarization analyzer according to the present invention, and Figure 4 is the book. FIG. 2 shows a cross-sectional view of a sample fixing part on a sample stage of the polarization analyzer according to the invention. 1...Light source, 4...Detector, 31...
...Light, 32...Sample, 33...
Sample surface, 35...Rotation axis, 36...Sample fixture, 37...Reference surface, 39...
Sample stage rotation center axis, 40... Cylindrical body, 44, curved/Y direction moving table, 45... X direction moving table, 47
......Light entrance aperture. %1 figure 3 figure −

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 試料の被測定面に回転軸を一致させて測定を行なう目的
に供せられる光学測定用試料台において、試料の被測定
面を押しあてる基準面をもちかつ背後より光の入射が可
能な開口部を有する試料固定具と、その固定具の基準面
に中心軸が含まれる如く固定された円筒とを具備し、そ
の円筒の中心軸を試料台の回転軸に平行に配置して、上
記固定具及び円筒を試料台回転軸と直角の移動方向をも
つX、 Y両移動台上に設けたことを特徴とする光学試
料台。
In a sample stage for optical measurement used for the purpose of making measurements by aligning the axis of rotation with the surface to be measured of the sample, an opening that has a reference surface against which the surface to be measured of the sample is pressed and allows light to enter from behind. and a cylinder fixed such that the central axis is included in the reference plane of the fixture, and the central axis of the cylinder is arranged parallel to the rotation axis of the sample stage, An optical sample stage characterized in that a cylinder and a cylinder are provided on both X and Y moving stages whose movement directions are perpendicular to the axis of rotation of the sample stage.
JP7069482U 1982-05-17 1982-05-17 optical sample stage Pending JPS58172858U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7069482U JPS58172858U (en) 1982-05-17 1982-05-17 optical sample stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7069482U JPS58172858U (en) 1982-05-17 1982-05-17 optical sample stage

Publications (1)

Publication Number Publication Date
JPS58172858U true JPS58172858U (en) 1983-11-18

Family

ID=30080350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7069482U Pending JPS58172858U (en) 1982-05-17 1982-05-17 optical sample stage

Country Status (1)

Country Link
JP (1) JPS58172858U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0464763U (en) * 1990-10-15 1992-06-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0464763U (en) * 1990-10-15 1992-06-03

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