JPH0464174B2 - - Google Patents
Info
- Publication number
- JPH0464174B2 JPH0464174B2 JP59000603A JP60384A JPH0464174B2 JP H0464174 B2 JPH0464174 B2 JP H0464174B2 JP 59000603 A JP59000603 A JP 59000603A JP 60384 A JP60384 A JP 60384A JP H0464174 B2 JPH0464174 B2 JP H0464174B2
- Authority
- JP
- Japan
- Prior art keywords
- solution
- growth
- supersaturation
- degree
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007791 liquid phase Substances 0.000 claims description 8
- 239000002904 solvent Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 17
- 239000000758 substrate Substances 0.000 description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 235000015067 sauces Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000155 melt Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02392—Phosphides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02625—Liquid deposition using melted materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02628—Liquid deposition using solutions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60384A JPS60144933A (ja) | 1984-01-06 | 1984-01-06 | 液相成長装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60384A JPS60144933A (ja) | 1984-01-06 | 1984-01-06 | 液相成長装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60144933A JPS60144933A (ja) | 1985-07-31 |
JPH0464174B2 true JPH0464174B2 (de) | 1992-10-14 |
Family
ID=11478305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60384A Granted JPS60144933A (ja) | 1984-01-06 | 1984-01-06 | 液相成長装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60144933A (de) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4840806A (de) * | 1971-09-21 | 1973-06-15 |
-
1984
- 1984-01-06 JP JP60384A patent/JPS60144933A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4840806A (de) * | 1971-09-21 | 1973-06-15 |
Also Published As
Publication number | Publication date |
---|---|
JPS60144933A (ja) | 1985-07-31 |
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