JPH0462310B2 - - Google Patents

Info

Publication number
JPH0462310B2
JPH0462310B2 JP23465185A JP23465185A JPH0462310B2 JP H0462310 B2 JPH0462310 B2 JP H0462310B2 JP 23465185 A JP23465185 A JP 23465185A JP 23465185 A JP23465185 A JP 23465185A JP H0462310 B2 JPH0462310 B2 JP H0462310B2
Authority
JP
Japan
Prior art keywords
salt
polyhalometal
metalloid
mixture
triarylsulfonium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP23465185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61100557A (ja
Inventor
Binsento Kuribero Jeimusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JPS61100557A publication Critical patent/JPS61100557A/ja
Publication of JPH0462310B2 publication Critical patent/JPH0462310B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP23465185A 1984-10-22 1985-10-22 トリアリールスルホニウム塩およびその製法 Granted JPS61100557A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US66364384A 1984-10-22 1984-10-22
US771744 1985-09-03
US663643 1996-06-14

Publications (2)

Publication Number Publication Date
JPS61100557A JPS61100557A (ja) 1986-05-19
JPH0462310B2 true JPH0462310B2 (enrdf_load_stackoverflow) 1992-10-05

Family

ID=24662705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23465185A Granted JPS61100557A (ja) 1984-10-22 1985-10-22 トリアリールスルホニウム塩およびその製法

Country Status (1)

Country Link
JP (1) JPS61100557A (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61212554A (ja) * 1985-03-15 1986-09-20 Asahi Denka Kogyo Kk 芳香族ジスルホニウム塩の製法
EP1953139A4 (en) * 2005-11-25 2010-07-28 San Apro Ltd PROCESS FOR PREPARING FLUORINATED SULPHONIUM ALKYL FLUORO PHOSPHATE
US20100297541A1 (en) * 2007-10-10 2010-11-25 Basf Se Sulphonium salt initiators
JP5491913B2 (ja) * 2009-03-18 2014-05-14 サンアプロ株式会社 化学増幅型ポジ型フォトレジスト組成物及びレジストパターンの製造方法
WO2011016425A1 (ja) * 2009-08-03 2011-02-10 サンアプロ株式会社 光酸発生剤，光硬化性組成物，及びその硬化体
JP5767040B2 (ja) * 2011-07-05 2015-08-19 サンアプロ株式会社 スルホニウム塩、光酸発生剤、硬化性組成物およびレジスト組成物
US9469604B2 (en) 2014-09-08 2016-10-18 Toyo Gosei Co., Ltd. Method of manufacturing sulfonium salt
US10059662B2 (en) 2014-09-26 2018-08-28 Tokyo Ohka Kogyo Co., Ltd. Sulfonium salt, photoacid generator, and photosensitive composition
JP6603127B2 (ja) 2015-12-29 2019-11-06 サンアプロ株式会社 感光性組成物
WO2021251035A1 (ja) 2020-06-12 2021-12-16 サンアプロ株式会社 新規オニウム塩、および光酸発生剤
JPWO2022130796A1 (enrdf_load_stackoverflow) 2020-12-14 2022-06-23

Also Published As

Publication number Publication date
JPS61100557A (ja) 1986-05-19

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