JPH0461076B2 - - Google Patents
Info
- Publication number
- JPH0461076B2 JPH0461076B2 JP1170491A JP17049189A JPH0461076B2 JP H0461076 B2 JPH0461076 B2 JP H0461076B2 JP 1170491 A JP1170491 A JP 1170491A JP 17049189 A JP17049189 A JP 17049189A JP H0461076 B2 JPH0461076 B2 JP H0461076B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film forming
- film
- forming chamber
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 85
- 239000000758 substrate Substances 0.000 claims description 67
- 239000010409 thin film Substances 0.000 claims description 21
- 239000002994 raw material Substances 0.000 claims description 17
- 239000003595 mist Substances 0.000 claims description 11
- 239000000243 solution Substances 0.000 description 15
- 239000011521 glass Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910017855 NH 4 F Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Chemically Coating (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1170491A JPH0336278A (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1170491A JPH0336278A (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0336278A JPH0336278A (ja) | 1991-02-15 |
| JPH0461076B2 true JPH0461076B2 (fr) | 1992-09-29 |
Family
ID=15905949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1170491A Granted JPH0336278A (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336278A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8907204B2 (en) | 2008-05-22 | 2014-12-09 | Kaneka Corporation | Thin film photoelectric conversion device and method for manufacturing the same |
-
1989
- 1989-06-30 JP JP1170491A patent/JPH0336278A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0336278A (ja) | 1991-02-15 |
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