JPH0460549B2 - - Google Patents

Info

Publication number
JPH0460549B2
JPH0460549B2 JP60225439A JP22543985A JPH0460549B2 JP H0460549 B2 JPH0460549 B2 JP H0460549B2 JP 60225439 A JP60225439 A JP 60225439A JP 22543985 A JP22543985 A JP 22543985A JP H0460549 B2 JPH0460549 B2 JP H0460549B2
Authority
JP
Japan
Prior art keywords
sensitive body
substance
substrate
detected
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60225439A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6283641A (ja
Inventor
Masaya Hijikigawa
Terue Kataoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP60225439A priority Critical patent/JPS6283641A/ja
Priority to DE19863634132 priority patent/DE3634132C2/de
Priority to GB8624094A priority patent/GB2183344B/en
Publication of JPS6283641A publication Critical patent/JPS6283641A/ja
Priority to US07/579,195 priority patent/US5140393A/en
Publication of JPH0460549B2 publication Critical patent/JPH0460549B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/001—Enzyme electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327—Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Pathology (AREA)
  • Zoology (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • Wood Science & Technology (AREA)
  • Biotechnology (AREA)
  • Microbiology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Biophysics (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • General Engineering & Computer Science (AREA)
  • Genetics & Genomics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
JP60225439A 1985-10-08 1985-10-08 電界効果型半導体センサ Granted JPS6283641A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP60225439A JPS6283641A (ja) 1985-10-08 1985-10-08 電界効果型半導体センサ
DE19863634132 DE3634132C2 (de) 1985-10-08 1986-10-07 Biosensoreinrichtung
GB8624094A GB2183344B (en) 1985-10-08 1986-10-08 Sensor
US07/579,195 US5140393A (en) 1985-10-08 1990-09-05 Sensor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60225439A JPS6283641A (ja) 1985-10-08 1985-10-08 電界効果型半導体センサ

Publications (2)

Publication Number Publication Date
JPS6283641A JPS6283641A (ja) 1987-04-17
JPH0460549B2 true JPH0460549B2 (sh) 1992-09-28

Family

ID=16829380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60225439A Granted JPS6283641A (ja) 1985-10-08 1985-10-08 電界効果型半導体センサ

Country Status (3)

Country Link
JP (1) JPS6283641A (sh)
DE (1) DE3634132C2 (sh)
GB (1) GB2183344B (sh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008116210A (ja) * 2006-10-31 2008-05-22 Mitsumi Electric Co Ltd センサおよび検出方法

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US4928513A (en) * 1986-07-29 1990-05-29 Sharp Kabushiki Kaisha Sensor
GB2224356A (en) * 1988-10-31 1990-05-02 Plessey Co Plc Biosensor device
EP0390692A3 (en) * 1989-03-29 1991-10-02 Terumo Kabushiki Kaisha Method of forming thin film, apparatus for forming thin film and sensor
FR2652652B1 (fr) * 1989-10-02 1991-12-13 Commissariat Energie Atomique Procede et dispositif de detection d'especes chimiques au moyen d'un film mince de semiconducteur inorganique.
EP0645621A3 (de) * 1993-09-28 1995-11-08 Siemens Ag Sensoranordnung.
USRE40209E1 (en) 1994-06-13 2008-04-01 Matsushita Electric Industrial Co., Ltd. Cell potential measurement apparatus having a plurality of microelectrodes
US5563067A (en) 1994-06-13 1996-10-08 Matsushita Electric Industrial Co., Ltd. Cell potential measurement apparatus having a plurality of microelectrodes
DE4427921C2 (de) * 1994-08-06 2002-09-26 Forschungszentrum Juelich Gmbh Chemische Sensoren, insbesondere Biosensoren, auf Siliciumbasis
DE19859998C2 (de) * 1998-12-23 2000-11-30 Siemens Ag Gassensor und Verfahren zu dessen Herstellung
SE0102426D0 (sv) * 2001-07-06 2001-07-06 Bioett Ab Fuktsensor
ES2347540T3 (es) * 2001-12-21 2010-11-02 Bae Systems Plc Sistema sensor.
US6852996B2 (en) * 2002-09-25 2005-02-08 Stmicroelectronics, Inc. Organic semiconductor sensor device
JP4232108B2 (ja) * 2005-05-20 2009-03-04 セイコーエプソン株式会社 標的物質の検出または定量方法、該方法に用いられる電極基板、装置、およびキット
EP1767934B1 (en) * 2005-09-21 2007-12-05 Adixen Sensistor AB Hydrogen gas sensitive semiconductor sensor
GB0522461D0 (en) 2005-11-03 2005-12-14 Immunoclin Ltd Dactyl detector
FI20060389L (fi) * 2006-04-21 2007-10-22 Environics Oy Sensori
JP5358061B2 (ja) * 2007-02-28 2013-12-04 インフィコン エービー 改良された水素ガス感知半導体センサ
KR101337673B1 (ko) * 2007-03-15 2013-12-06 인피콘 아베 향상된 수소 가스 고감도 반도체 센서
JP5159453B2 (ja) * 2008-06-13 2013-03-06 ローム株式会社 イオンセンサ
US9134270B2 (en) * 2010-03-25 2015-09-15 Stichting Imec Nederland Amorphous thin film for sensing
US20130214332A1 (en) * 2011-08-26 2013-08-22 Diagtronix, Inc. Nanogrid channel fin-fet transistor and biosensor
JP5903872B2 (ja) * 2011-12-19 2016-04-13 大日本印刷株式会社 トランジスタ型センサ、およびトランジスタ型センサの製造方法
DE102014104219B4 (de) * 2014-03-26 2019-09-12 Heraeus Nexensos Gmbh Keramikträger sowie Sensorelement, Heizelement und Sensormodul jeweils mit einem Keramikträger und Verfahren zur Herstellung eines Keramikträgers
JP6569901B2 (ja) * 2015-08-28 2019-09-04 ラピスセミコンダクタ株式会社 半導体装置及び半導体装置の製造方法
DE102015220909A1 (de) * 2015-10-27 2017-04-27 Robert Bosch Gmbh Verwenden eines ionensensitiven Feldeffekttransistors zum Messen einer Konzentration von Wasserstoffperoxid in einem Fluid
DE102016101249A1 (de) * 2015-11-02 2017-05-04 Epcos Ag Sensorelement und Verfahren zur Herstellung eines Sensorelements
TWI669496B (zh) * 2016-09-26 2019-08-21 美商羅門哈斯電子材料有限公司 氣體感測器及其製造方法
US11092567B2 (en) 2017-03-21 2021-08-17 International Business Machines Corporation Biosensor electrode having three-dimensional structured sensing surfaces
DE102017209269A1 (de) 2017-06-01 2018-12-06 Robert Bosch Gmbh MEMS-Mediensensor
CN113358608B (zh) * 2020-03-06 2023-03-21 中国科学院化学研究所 气体传感器及其制备方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51139289A (en) * 1975-03-12 1976-12-01 Univ Utah Chemically sensitive fe converter
JPS52139777A (en) * 1976-05-14 1977-11-21 Omron Tateisi Electronics Co Fixed enzyme membrane
JPS55140142A (en) * 1979-03-20 1980-11-01 Olympus Optical Co Ltd Field-effect semiconductor sensor and its manufacture
JPS56111454A (en) * 1980-02-06 1981-09-03 Kuraray Co Ltd Fet sensor
JPS58179348A (ja) * 1982-04-14 1983-10-20 Hokuriku Denki Kogyo Kk Ａｌの陽極酸化薄膜を用いた湿度センサ素子
JPS5921756B2 (ja) * 1979-03-16 1984-05-22 ロボツトグルツペン・エツチ・ビイ 可撓腕
JPS59120945A (ja) * 1982-12-28 1984-07-12 Shinkosumosu Denki Kk 水素選択性センサ
JPS59151051A (ja) * 1983-02-17 1984-08-29 Matsushita Electric Works Ltd 生体触媒電極
JPS6029653A (ja) * 1983-07-29 1985-02-15 Hitachi Ltd ガスセンサ

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FR2252041A5 (sh) * 1973-11-16 1975-06-13 Thomson Csf
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US4104605A (en) * 1976-09-15 1978-08-01 General Electric Company Thin film strain gauge and method of fabrication
JPS5825221B2 (ja) * 1977-12-12 1983-05-26 株式会社クラレ Ｆｅｔ比較電極
US4313338A (en) * 1978-08-18 1982-02-02 Matsushita Electric Industrial Co., Ltd. Gas sensing device
DE3041952A1 (de) * 1979-11-13 1981-09-03 Gould Inc., 60008 Rolling Meadows, Ill. Verfahren zur erzeugung einer duennschicht-sensoranordnung
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ATE30780T1 (de) * 1981-06-22 1987-11-15 Battelle Memorial Institute Verfahren zum bestimmen bioaktiver substanzen.
GB2103786A (en) * 1981-08-14 1983-02-23 Ici Plc Fibre optic sensor
JPS5921756U (ja) * 1982-08-02 1984-02-09 三菱レイヨン株式会社 酵素電極
CA1209681A (en) * 1982-08-04 1986-08-12 Exxon Research And Engineering Company Optically enhanced thin film photovoltaic device using lithography defined random surfaces
JPS59127879A (ja) * 1983-01-12 1984-07-23 Semiconductor Energy Lab Co Ltd 光電変換装置およびその作製方法
US4515653A (en) * 1983-04-30 1985-05-07 Sharp Kabushiki Kaisha Method for production of a moisture sensor
JPS59206756A (ja) * 1983-05-11 1984-11-22 Hitachi Ltd 参照電極を一体化したｆｅｔ化学センサ−
GB2142147A (en) * 1983-06-24 1985-01-09 Standard Telephones Cables Ltd Gas sensor
GB2162440B (en) * 1984-08-02 1987-10-14 Stc Plc Optical fibres
GB8423204D0 (en) * 1984-09-14 1984-10-17 Comtech Res Unit Assay technique and equipment
JPS61198040A (ja) * 1984-12-08 1986-09-02 テストターム・メステヒニーク・ゲー・エム・ベー・ハー・ウント・コンパニー 光学式露点センサ−

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51139289A (en) * 1975-03-12 1976-12-01 Univ Utah Chemically sensitive fe converter
JPS52139777A (en) * 1976-05-14 1977-11-21 Omron Tateisi Electronics Co Fixed enzyme membrane
JPS5921756B2 (ja) * 1979-03-16 1984-05-22 ロボツトグルツペン・エツチ・ビイ 可撓腕
JPS55140142A (en) * 1979-03-20 1980-11-01 Olympus Optical Co Ltd Field-effect semiconductor sensor and its manufacture
JPS56111454A (en) * 1980-02-06 1981-09-03 Kuraray Co Ltd Fet sensor
JPS58179348A (ja) * 1982-04-14 1983-10-20 Hokuriku Denki Kogyo Kk Ａｌの陽極酸化薄膜を用いた湿度センサ素子
JPS59120945A (ja) * 1982-12-28 1984-07-12 Shinkosumosu Denki Kk 水素選択性センサ
JPS59151051A (ja) * 1983-02-17 1984-08-29 Matsushita Electric Works Ltd 生体触媒電極
JPS6029653A (ja) * 1983-07-29 1985-02-15 Hitachi Ltd ガスセンサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008116210A (ja) * 2006-10-31 2008-05-22 Mitsumi Electric Co Ltd センサおよび検出方法

Also Published As

Publication number Publication date
GB2183344A (en) 1987-06-03
JPS6283641A (ja) 1987-04-17
DE3634132A1 (de) 1987-04-16
DE3634132C2 (de) 1993-10-14
GB8624094D0 (en) 1986-11-12
GB2183344B (en) 1990-03-14

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