JPH045979B2 - - Google Patents

Info

Publication number
JPH045979B2
JPH045979B2 JP58070494A JP7049483A JPH045979B2 JP H045979 B2 JPH045979 B2 JP H045979B2 JP 58070494 A JP58070494 A JP 58070494A JP 7049483 A JP7049483 A JP 7049483A JP H045979 B2 JPH045979 B2 JP H045979B2
Authority
JP
Japan
Prior art keywords
exposure mask
cleaning
section
dust detection
automatic dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58070494A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59195645A (ja
Inventor
Hiromi Yamashita
Toshio Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP58070494A priority Critical patent/JPS59195645A/ja
Priority to US06/602,519 priority patent/US4569695A/en
Publication of JPS59195645A publication Critical patent/JPS59195645A/ja
Publication of JPH045979B2 publication Critical patent/JPH045979B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP58070494A 1983-04-21 1983-04-21 露光マスク洗浄装置 Granted JPS59195645A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58070494A JPS59195645A (ja) 1983-04-21 1983-04-21 露光マスク洗浄装置
US06/602,519 US4569695A (en) 1983-04-21 1984-04-20 Method of cleaning a photo-mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58070494A JPS59195645A (ja) 1983-04-21 1983-04-21 露光マスク洗浄装置

Publications (2)

Publication Number Publication Date
JPS59195645A JPS59195645A (ja) 1984-11-06
JPH045979B2 true JPH045979B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-04

Family

ID=13433126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58070494A Granted JPS59195645A (ja) 1983-04-21 1983-04-21 露光マスク洗浄装置

Country Status (1)

Country Link
JP (1) JPS59195645A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011257304A (ja) * 2010-06-10 2011-12-22 Hitachi High-Technologies Corp 基板検査方法及び装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0812850B2 (ja) * 1987-03-17 1996-02-07 株式会社ニコン 洗浄方法
JPH05241329A (ja) * 1992-03-03 1993-09-21 Nec Yamagata Ltd マスク洗浄機
JP5002471B2 (ja) * 2008-01-31 2012-08-15 東京エレクトロン株式会社 基板洗浄装置、基板洗浄方法、プログラム及びコンピュータ記憶媒体
TWI769514B (zh) * 2020-09-01 2022-07-01 家登精密工業股份有限公司 光罩盒潔淨設備

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441158B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-07-14 1979-12-06
JPS55102233A (en) * 1979-01-30 1980-08-05 Matsushita Electric Ind Co Ltd Removing method of dust

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011257304A (ja) * 2010-06-10 2011-12-22 Hitachi High-Technologies Corp 基板検査方法及び装置

Also Published As

Publication number Publication date
JPS59195645A (ja) 1984-11-06

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