JPH0459770B2 - - Google Patents
Info
- Publication number
- JPH0459770B2 JPH0459770B2 JP17409986A JP17409986A JPH0459770B2 JP H0459770 B2 JPH0459770 B2 JP H0459770B2 JP 17409986 A JP17409986 A JP 17409986A JP 17409986 A JP17409986 A JP 17409986A JP H0459770 B2 JPH0459770 B2 JP H0459770B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- cleaning
- wafer
- ice
- ice particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17409986A JPS6329515A (ja) | 1986-07-22 | 1986-07-22 | 半導体ウエハの洗浄方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17409986A JPS6329515A (ja) | 1986-07-22 | 1986-07-22 | 半導体ウエハの洗浄方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6329515A JPS6329515A (ja) | 1988-02-08 |
| JPH0459770B2 true JPH0459770B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-09-24 |
Family
ID=15972630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17409986A Granted JPS6329515A (ja) | 1986-07-22 | 1986-07-22 | 半導体ウエハの洗浄方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329515A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0243730A (ja) * | 1988-08-04 | 1990-02-14 | Taiyo Sanso Co Ltd | 半導体ウエハの洗浄装置 |
| JPH02130921A (ja) * | 1988-11-11 | 1990-05-18 | Taiyo Sanso Co Ltd | 固体表面洗浄装置 |
| JPH02270322A (ja) * | 1989-04-11 | 1990-11-05 | Taiyo Sanso Co Ltd | 半導体ウェハの洗浄装置 |
| JPH03116832A (ja) * | 1989-09-29 | 1991-05-17 | Mitsubishi Electric Corp | 固体表面の洗浄方法 |
| US6676766B2 (en) * | 2000-05-02 | 2004-01-13 | Sprout Co., Ltd. | Method for cleaning a substrate using a sherbet-like composition |
| JP4639452B2 (ja) * | 2000-09-26 | 2011-02-23 | ダイキン工業株式会社 | 基板洗浄方法およびその装置 |
| CN115415220B (zh) * | 2022-08-30 | 2023-08-22 | 江苏龙升药业有限公司 | 一种可连续对姜黄清洗的设备及清洗方法 |
-
1986
- 1986-07-22 JP JP17409986A patent/JPS6329515A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6329515A (ja) | 1988-02-08 |
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