JPH0458192B2 - - Google Patents
Info
- Publication number
- JPH0458192B2 JPH0458192B2 JP63233012A JP23301288A JPH0458192B2 JP H0458192 B2 JPH0458192 B2 JP H0458192B2 JP 63233012 A JP63233012 A JP 63233012A JP 23301288 A JP23301288 A JP 23301288A JP H0458192 B2 JPH0458192 B2 JP H0458192B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- forming
- amorphous
- silicon hydride
- amorphous silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
- H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/10—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
- H10F30/15—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors comprising amorphous semiconductors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63233012A JPH01164074A (ja) | 1988-09-16 | 1988-09-16 | 非晶質水素化シリコン光導電膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63233012A JPH01164074A (ja) | 1988-09-16 | 1988-09-16 | 非晶質水素化シリコン光導電膜の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57026241A Division JPS58142582A (ja) | 1982-02-19 | 1982-02-19 | 非晶質水素化シリコン光導電膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01164074A JPH01164074A (ja) | 1989-06-28 |
| JPH0458192B2 true JPH0458192B2 (enrdf_load_stackoverflow) | 1992-09-16 |
Family
ID=16948432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63233012A Granted JPH01164074A (ja) | 1988-09-16 | 1988-09-16 | 非晶質水素化シリコン光導電膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01164074A (enrdf_load_stackoverflow) |
-
1988
- 1988-09-16 JP JP63233012A patent/JPH01164074A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01164074A (ja) | 1989-06-28 |
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