JPH0455213B2 - - Google Patents

Info

Publication number
JPH0455213B2
JPH0455213B2 JP58107872A JP10787283A JPH0455213B2 JP H0455213 B2 JPH0455213 B2 JP H0455213B2 JP 58107872 A JP58107872 A JP 58107872A JP 10787283 A JP10787283 A JP 10787283A JP H0455213 B2 JPH0455213 B2 JP H0455213B2
Authority
JP
Japan
Prior art keywords
seal member
vacuum
seal
roll
preliminary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58107872A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60943A (ja
Inventor
Susumu Ueno
Koichi Kuroda
Hajime Kitamura
Masaya Tokai
Kenichi Kato
Nobuyuki Hiraishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP10787283A priority Critical patent/JPS60943A/ja
Publication of JPS60943A publication Critical patent/JPS60943A/ja
Publication of JPH0455213B2 publication Critical patent/JPH0455213B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)
JP10787283A 1983-06-17 1983-06-17 真空連続処理装置 Granted JPS60943A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10787283A JPS60943A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10787283A JPS60943A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Publications (2)

Publication Number Publication Date
JPS60943A JPS60943A (ja) 1985-01-07
JPH0455213B2 true JPH0455213B2 (cs) 1992-09-02

Family

ID=14470221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10787283A Granted JPS60943A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Country Status (1)

Country Link
JP (1) JPS60943A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3339291C2 (de) * 1982-10-30 1995-11-30 Daiso Co Ltd Diallylterephthalatcopolymeres

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57195740A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Continuous vacuum treatment apparatus

Also Published As

Publication number Publication date
JPS60943A (ja) 1985-01-07

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