JPH0455213B2 - - Google Patents
Info
- Publication number
- JPH0455213B2 JPH0455213B2 JP58107872A JP10787283A JPH0455213B2 JP H0455213 B2 JPH0455213 B2 JP H0455213B2 JP 58107872 A JP58107872 A JP 58107872A JP 10787283 A JP10787283 A JP 10787283A JP H0455213 B2 JPH0455213 B2 JP H0455213B2
- Authority
- JP
- Japan
- Prior art keywords
- seal member
- vacuum
- seal
- roll
- preliminary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 description 11
- 229920006311 Urethane elastomer Polymers 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 229920000459 Nitrile rubber Polymers 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000004590 silicone sealant Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はプラスチツク成形品、たとえば、塩化
ビニール系樹脂フイルムを連続的に真空状態で処
理（たとえばプラズマ処理、真空蒸着など）する
真空連続処理装置に関するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a continuous vacuum processing apparatus for continuously processing plastic molded products, such as vinyl chloride resin films, in a vacuum state (for example, plasma treatment, vacuum evaporation, etc.). It is related to.
従来、真空処理室の側方に配置される予備真空
室に設けられて被処理物を搬送するシールロール
と、このシールロールを収納するケーシングとの
間にはシール部材を取付け、これらシール部材と
シールロールとで真空処理室を大気から遮断して
おり、シール部材としては、ニトリルゴム、ウレ
タンゴムなどを使用したものや、シール部材の補
強金具を埋めこんだものがある。
Conventionally, a sealing member is installed between a sealing roll that is installed in a preliminary vacuum chamber placed on the side of a vacuum processing chamber and conveys the processed material, and a casing that houses this sealing roll, and these sealing members and The vacuum processing chamber is isolated from the atmosphere by a seal roll, and the seal member may be made of nitrile rubber, urethane rubber, or the like, or may have reinforcing metal fittings embedded in the seal member.
上記従来技術は、シール部材に加わる圧力差が
大きいときには、シール部材の先端の変形が大き
くなり、シール性が低下する。また、変形を防止
するために、シールロールに対する押圧力を大き
くすると、シール部材とシールロールとの摩耗が
激しいという問題があつた。
In the above-described conventional technology, when the pressure difference applied to the seal member is large, the tip of the seal member deforms greatly and the sealing performance deteriorates. Furthermore, when the pressing force against the seal roll is increased to prevent deformation, there is a problem in that the seal member and the seal roll are subject to severe wear.
本発明の目的は、シール部材に加わる差圧が大
きいときでもシール部材の変形がなく良好なシー
ル性を得るようにした真空連続処理装置を提供す
ることにある。 SUMMARY OF THE INVENTION An object of the present invention is to provide a continuous vacuum processing apparatus that does not deform the seal member and provides good sealing performance even when the differential pressure applied to the seal member is large.
本発明は上記目的を達成するために、真空処理
室の側方に配置する予備真空室と、その予備真空
室内に配置するシールロールと、このシールロー
ルの外周に接するシール部材とを備える真空連続
処理装置において、前記シール部材を折り曲げ、
この折り曲げたシール部材の内側の凹部及びこの
凹部に対応するシール部材の外側にシール部材の
変形を防止する弾性体を取り付けたものであ。
In order to achieve the above object, the present invention provides a vacuum continuous system comprising a preliminary vacuum chamber disposed on the side of a vacuum processing chamber, a seal roll disposed within the preliminary vacuum chamber, and a sealing member in contact with the outer periphery of the seal roll. In the processing device, bending the sealing member,
An elastic body is attached to the inner recess of the bent seal member and the outer side of the seal member corresponding to the recess to prevent deformation of the seal member.
シール部材に大気側と真空側との圧力差によつ
て先端を変形させようとする力が加わつても、シ
ールロールの接触近傍にある弾性体が変形を防止
させるようにシール部材に作用するので、先端の
変形が防止される。
Even if a force is applied to the seal member to deform its tip due to the pressure difference between the atmospheric side and the vacuum side, the elastic body near the contact of the seal roll acts on the seal member to prevent deformation. , deformation of the tip is prevented.
以下本発明の一実施例を図面により説明する。 An embodiment of the present invention will be described below with reference to the drawings.
第１図および第２図において、１はプラスチツ
クフイルム例えば塩化ビニール系樹脂フイルムの
ように化撓性の被処理物Ｆを真空状態で連続的に
プラズマ処理する真空処理室、２は真空処理室１
の前方側に複数個配置される予備真空室、３は真
空処理室１の後方側に複数個配置される予備真空
室で、前記真空処理室１内はこれに接続する真空
ポンプ４により10-2トール程度の真空圧力に保持
するように排気管５を介して真空排気される。前
記予備真空室２，３内はこれに接続する真空ポン
プ６により前記真空処理室１内の真空圧力より若
干高く、かつ大気圧より段階的に減じる真空圧力
に保持するように排気管７を介して真空排気され
る。 In FIGS. 1 and 2, 1 is a vacuum processing chamber in which a flexible workpiece F, such as a plastic film, for example, a vinyl chloride resin film, is subjected to continuous plasma treatment in a vacuum state; 2 is a vacuum processing chamber 1
A plurality of preliminary vacuum chambers 3 are arranged on the front side of the vacuum processing chamber 1, and a plurality of preliminary vacuum chambers 3 are arranged on the rear side of the vacuum processing chamber 1 . It is evacuated through an exhaust pipe 5 to maintain a vacuum pressure of about 2 torr. The inside of the preliminary vacuum chambers 2 and 3 is maintained at a vacuum pressure slightly higher than the vacuum pressure inside the vacuum processing chamber 1 by a vacuum pump 6 connected thereto, and gradually reduced from atmospheric pressure through an exhaust pipe 7. and evacuated.
処理される被処理物Ｆは巻出装置８より前方側
の予備真空室２を経て真空処理室１へ送られ、そ
こでプラズマ処理された後、さらに後方側の予備
真空室３を経て巻取装置９で巻取られる。１０は
駆動用モータで、この駆動用モータ１０はライン
シヤフト１１および無段変速機１２，１３，１
４，１５を介して真空処理室１、予備真空室２，
３、巻取装置９へ駆動力を伝達し、真空処理室
１、予備真空室２，３および巻取装置９の各駆動
系の回転速度は前記無段変速機１２，１３，１
４，１５により適宜調整される。 The workpiece F to be processed is sent from the unwinding device 8 through the preliminary vacuum chamber 2 on the front side to the vacuum processing chamber 1, where it is subjected to plasma treatment, and then further passed through the preliminary vacuum chamber 3 on the rear side to the winding device. It is wound up at 9. 10 is a drive motor, and this drive motor 10 is connected to a line shaft 11 and continuously variable transmissions 12, 13, 1.
4, 15 to the vacuum processing chamber 1, preliminary vacuum chamber 2,
3. The driving force is transmitted to the winding device 9, and the rotational speed of each drive system of the vacuum processing chamber 1, preliminary vacuum chambers 2, 3, and winding device 9 is controlled by the continuously variable transmissions 12, 13, 1.
4 and 15 as appropriate.
前記前方および後方予備真空室２，３は第３図
および第４図に示す如く、上下一対のシールロー
ル１６，１７、上下ケース１８，１９および上下
シール部材２０，２１などから構成されており、
以下にその詳細を説明する。 As shown in FIGS. 3 and 4, the front and rear preliminary vacuum chambers 2, 3 are composed of a pair of upper and lower seal rolls 16, 17, upper and lower cases 18, 19, upper and lower seal members 20, 21, etc.
The details will be explained below.
第３図および第４図において、２０は上ケース
１８に固定され、かつ上シールロール１６の表面
の一部と軸方向に沿つて連続的に対接するシール
部材で、このシール部材２０はウレタンゴムなど
のような耐摩耗性の大なるものを使用する。２１
は下ケース１９に固定され、かつ下シールロール
１７の表面の一部と軸方向に沿つて連続的に対接
するシール部材で、このシール部材２１も上記シ
ール部材２０と同様にウレタンゴムなどを使用す
る。これらシール部材２０，２１の断面形状は第
５図に示す如く上下シールロール１６，１７と対
接する先端側が弾力性を有するように折れ曲つて
いる。そして、シール部材２０は全体をニトリル
ゴムにより形成する。２２はシール部材２０の先
端側に設けられる弾性を有する板ばねで、この板
ばねはシール部材２０に加わる圧力差が大きいと
きに発生するシール部材の先端側の変形を防止す
る。この板ばねはシール部材２０の成形時に一体
に成形してもよく、あるいは別々に成形した後一
体的に取付けてもよい。また補強体２３を埋め込
むことによりシール部材２０，２１全体の変形を
防止することができる。 In FIGS. 3 and 4, reference numeral 20 denotes a seal member fixed to the upper case 18 and continuously in contact with a part of the surface of the upper seal roll 16 along the axial direction, and this seal member 20 is made of urethane rubber. Use a material with high abrasion resistance, such as 21
is a seal member fixed to the lower case 19 and continuously in contact with a part of the surface of the lower seal roll 17 along the axial direction, and this seal member 21 is also made of urethane rubber or the like like the seal member 20 described above. do. As shown in FIG. 5, the cross-sectional shapes of the seal members 20 and 21 are bent so that the tip sides facing the upper and lower seal rolls 16 and 17 have elasticity. The seal member 20 is entirely made of nitrile rubber. Reference numeral 22 denotes an elastic leaf spring provided on the distal end side of the seal member 20, and this leaf spring prevents deformation of the distal end side of the seal member that occurs when the pressure difference applied to the seal member 20 is large. This leaf spring may be integrally molded when the sealing member 20 is molded, or may be molded separately and then integrally attached. Further, by embedding the reinforcing body 23, deformation of the seal members 20, 21 as a whole can be prevented.
２４はシール部材２０，２１の折り曲げたシー
ル部材の内側の凹部に沿つて取り付けた板ばねで
シール部材２０に加わる圧力差が大なるときに発
生するシール部材２０の先端側の変形を防止す
る。 A leaf spring 24 is attached along the inner recess of the bent seal members 20 and 21 to prevent deformation of the distal end side of the seal member 20 that occurs when the pressure difference applied to the seal member 20 becomes large.
さらに第６図に示すようにシール部材２０のシ
ールロールに対する押付力を過度に大きくしない
ようにスポンジ、あるいはシリコーンシーラント
のようなシール部材２０の材質よりもやわらかい
弾性体２４を凹部に埋込んでもよい。 Furthermore, as shown in FIG. 6, an elastic body 24 that is softer than the material of the seal member 20, such as a sponge or silicone sealant, may be embedded in the recess so as not to excessively increase the pressing force of the seal member 20 against the seal roll. .
本発明によれば、シール部材にかかる差圧が大
きい時でも、良好なシール性が得られ、またシー
ル部材を過度にロールに対して押しつけないた
め、シール部材の耐久性を確保することができ
る。
According to the present invention, even when the differential pressure applied to the seal member is large, good sealing properties can be obtained, and since the seal member is not excessively pressed against the roll, the durability of the seal member can be ensured. .
第１図および第２図は本発明の真空連続処理装
置の一実施例を示すもので、第１図は正面図、第
２図は第１図の平面図、第３図は本発明装置にお
ける予備真空室の要部を示す拡大図、第４図は第
３図の４−４線矢視図、第５図および第６図は本
発明装置におけるシール部材を説明するための図
である。
１……真空処理室、２，３……予備真空室、２
０，２１……シール部材。
1 and 2 show an embodiment of the vacuum continuous processing apparatus of the present invention. FIG. 1 is a front view, FIG. 2 is a plan view of FIG. 1, and FIG. FIG. 4 is a view taken along the line 4--4 in FIG. 3, and FIGS. 5 and 6 are views for explaining the sealing member in the apparatus of the present invention. 1... Vacuum processing chamber, 2, 3... Preliminary vacuum chamber, 2
0,21... Seal member.
Claims (1)
その予備真空室内に配置するシールロールと、こ
のシールロールの外周に接するシール部材とを備
える真空連続処理装置において、前記シール部材
を折り曲げ、この折り曲げたシール部材の内側の
凹部及びこの凹部に対応するシール部材の外側に
シール部材の変形を防止する弾性体を取り付けた
ことを特徴とする真空連続処理装置。1 A preliminary vacuum chamber located on the side of the vacuum processing chamber,
In a vacuum continuous processing apparatus comprising a seal roll disposed in the preliminary vacuum chamber and a seal member in contact with the outer periphery of the seal roll, the seal member is bent, and a recess on the inside of the bent seal member and a recess corresponding to the recess are provided. A vacuum continuous processing device characterized in that an elastic body is attached to the outside of the seal member to prevent deformation of the seal member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10787283A JPS60943A (en) | 1983-06-17 | 1983-06-17 | Continuous vacuum treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10787283A JPS60943A (en) | 1983-06-17 | 1983-06-17 | Continuous vacuum treatment device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60943A JPS60943A (en) | 1985-01-07 |
| JPH0455213B2 true JPH0455213B2 (en) | 1992-09-02 |
Family
ID=14470221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10787283A Granted JPS60943A (en) | 1983-06-17 | 1983-06-17 | Continuous vacuum treatment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60943A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4518764A (en) * | 1982-10-30 | 1985-05-21 | Osaka Soda Co. Ltd. | Diallyl terephthalate copolymer and composition comprising said copolymer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57195740A (en) * | 1981-05-29 | 1982-12-01 | Shin Etsu Chem Co Ltd | Continuous vacuum treatment apparatus |
-
1983
- 1983-06-17 JP JP10787283A patent/JPS60943A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57195740A (en) * | 1981-05-29 | 1982-12-01 | Shin Etsu Chem Co Ltd | Continuous vacuum treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60943A (en) | 1985-01-07 |
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