JPH0153293B2 - - Google Patents
Info
- Publication number
- JPH0153293B2 JPH0153293B2 JP56080901A JP8090181A JPH0153293B2 JP H0153293 B2 JPH0153293 B2 JP H0153293B2 JP 56080901 A JP56080901 A JP 56080901A JP 8090181 A JP8090181 A JP 8090181A JP H0153293 B2 JPH0153293 B2 JP H0153293B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- seal rolls
- eccentric bearing
- seal
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920006311 Urethane elastomer Polymers 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C37/0089—Sealing devices placed between articles and treatment installations during moulding or shaping, e.g. sealing off the entrance or exit of ovens or irradiation rooms, connections between rooms at different pressures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
Landscapes
- Rolls And Other Rotary Bodies (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
本発明はプラスチツク成形品、たとえば、塩化
ビニール系樹脂フイルムを連続的に真空状態でプ
ラズマ処理する真空連続処理装置に関するもの
で、上述のプラスチツク成形品とはプラスチツク
フイルム、プラスチツクシートあるいはプラスチ
ツク被覆電線などを指す。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum continuous processing apparatus for continuously plasma-treating plastic molded products, such as vinyl chloride resin films, in a vacuum state. Refers to sheets or plastic-coated wires.
最近、真空処理室の前後に予備真空室を配置
し、段階的に真空圧力を下げて被処理物を連続的
に表面処理する装置が開発されている。 Recently, an apparatus has been developed in which preliminary vacuum chambers are disposed before and after a vacuum processing chamber, and the vacuum pressure is lowered stepwise to continuously surface-treat the workpiece.
この種の装置においては、対接する一対のシー
ルロール間に間隙を設け、この間隙に被処理物を
連続的に通して表面処理をしている。 In this type of apparatus, a gap is provided between a pair of seal rolls that are in contact with each other, and the object to be treated is continuously passed through this gap to perform surface treatment.
この場合、被処理物を挿入するシールロール間
の間隙が小さ過ぎると、最初の被処理物を挿入
時、被処理物がシールロール間にひつかかつてし
まい、スムーズに挿入することができなかつた。 In this case, if the gap between the seal rolls into which the workpiece is inserted is too small, when the first workpiece is inserted, the workpiece gets stuck between the seal rolls and cannot be inserted smoothly. .
また、シールロール間の間隙を大きくすると、
漏洩する空気量が増加し、予備真空室内を所定の
真空度に維持することが困難であつた。 Also, if the gap between the seal rolls is increased,
The amount of air leaking increased, making it difficult to maintain a predetermined degree of vacuum within the preliminary vacuum chamber.
さらに、この装置ではシールロール間の間隙を
調節することができないため、被処理物の厚さが
変つた場合には最適なニツプ圧を得ることが困難
であり、特に、設定された間隙より薄い被処理物
を搬送する場合には予備真空室の真空が洩れ、予
備真空室を適度な真空度に保つことができなかつ
た。 Furthermore, since the gap between the seal rolls cannot be adjusted with this device, it is difficult to obtain the optimum nip pressure when the thickness of the workpiece changes, especially when the gap is thinner than the set gap. When the object to be processed is transported, the vacuum in the pre-vacuum chamber leaks, making it impossible to maintain the pre-vacuum chamber at an appropriate degree of vacuum.
なお、この種の装置として関連するものには例
えば特開昭54−95672号が挙げられる。 Note that related devices of this type include, for example, Japanese Patent Application Laid-Open No. 54-95672.
本発明は上記の点に鑑み、最初の被処理物挿入
を容易にし、またシールロール間のニツプ圧を調
整可能にするとともに、肉厚の変つた被処理物で
も適度な真空度を保つことができる真空連続処理
装置を提供することを目的とするものである。 In view of the above points, the present invention facilitates the initial insertion of the workpiece, makes it possible to adjust the nip pressure between the seal rolls, and maintains an appropriate degree of vacuum even when the workpiece has a different wall thickness. The purpose of this invention is to provide a vacuum continuous processing device that can perform continuous processing.
本発明は、真空処理室と該真空処理室の前後に
配置した予備真空室とを具え、該予備真空室を、
上下一対のシールロールを被処理物の搬送方向に
複数組配置することにより形成し、前記真空処理
室で被処理物を連続的に処理する真空連続処理装
置において、前記一対のシールロールのうち少な
くとも一方のシールロールを偏心軸受で支持し、
この偏心軸受にこれを回動させて対接するシール
ロール間のギヤツプおよびニツプ圧を調整する偏
心軸受駆動手段を設けたものである。 The present invention includes a vacuum processing chamber and a preliminary vacuum chamber disposed before and after the vacuum processing chamber, and the preliminary vacuum chamber includes:
In a vacuum continuous processing apparatus that is formed by arranging a plurality of pairs of upper and lower seal rolls in the conveying direction of the workpiece and continuously processes the workpiece in the vacuum processing chamber, at least one of the pair of seal rolls One seal roll is supported by an eccentric bearing,
This eccentric bearing is provided with an eccentric bearing driving means that rotates the eccentric bearing to adjust the gap and nip pressure between the seal rolls facing each other.
偏心軸受の一方向に回転させるとシールロール
間のギヤツプが形成されて被処理物の挿入が容易
となり、又、被処理物を処理するために連続的に
被処理物を搬送するときに必要なシールロール間
の機密保持は前記偏心軸受を前記回転方向とは逆
の方向に回転させることによつてニツプ圧を最適
なものとすることができる。 When the eccentric bearing is rotated in one direction, a gap is formed between the seal rolls, which facilitates the insertion of the workpiece. Security between the seal rolls can be maintained by optimizing the nip pressure by rotating the eccentric bearing in a direction opposite to the rotation direction.
以下本発明の一実施例を図面により説明する。 An embodiment of the present invention will be described below with reference to the drawings.
第１図および第２図において、１はプラスチツ
クフイルム例えば塩化ビニール系樹脂フイルムの
ように可撓性の被処理物Ｆを真空状態で連続的に
プラズマ処理する真空処理室、２は真空処理室１
の前方側に複数個配置される予備真空室、３は真
空処理室１の後方側に複数個配置される予備真空
室で、前記真空処理室１内はこれに接続する真空
ポンプ４により10-2トール程度の真空圧力に保持
するように排気管５を介して真空排出される。前
記予備真空室２，３内はこれに接続する真空ポン
プ６により前記真空処理室１内の真空圧力より若
干高く、かつ大気圧より段階的に減じる真空圧力
に保持するように排気管７を介して真空排気され
る。 1 and 2, 1 is a vacuum processing chamber in which a flexible workpiece F, such as a plastic film, for example, a vinyl chloride resin film, is subjected to continuous plasma treatment in a vacuum state; 2 is a vacuum processing chamber 1;
A plurality of preliminary vacuum chambers 3 are arranged on the front side of the vacuum processing chamber 1, and a plurality of preliminary vacuum chambers 3 are arranged on the rear side of the vacuum processing chamber 1 . It is evacuated through the exhaust pipe 5 to maintain a vacuum pressure of about 2 torr. The inside of the preliminary vacuum chambers 2 and 3 is maintained at a vacuum pressure slightly higher than the vacuum pressure inside the vacuum processing chamber 1 by a vacuum pump 6 connected thereto, and gradually reduced from atmospheric pressure through an exhaust pipe 7. and evacuated.
処理される被処理物Ｆは巻出装置８より前方側
の予備真空室２を経て真空処理室１へ送られ、そ
こでプラズマ処理された後、さらに後方側の予備
真空室３を経て巻取装置９で巻取られる。１０は
駆動用モータで、この駆動用モータ１０はライン
シヤフトおよび無段変速機１２，１３，１４，１
５を介して真空処理室１、予備真空室２，３、巻
取装置９へ駆動力を伝達し、真空処理室１、予備
真空室２，３および巻取装置９の各駆動系の回転
速度は前記無段変速機１２，１３，１４，１５に
より適宜調整される。 The workpiece F to be processed is sent from the unwinding device 8 through the preliminary vacuum chamber 2 on the front side to the vacuum processing chamber 1, where it is subjected to plasma treatment, and then further passed through the preliminary vacuum chamber 3 on the rear side to the winding device. It is wound up at 9. 10 is a drive motor, and this drive motor 10 is used for line shafts and continuously variable transmissions 12, 13, 14, 1.
The driving force is transmitted to the vacuum processing chamber 1, the preliminary vacuum chambers 2 and 3, and the winding device 9 through the is appropriately adjusted by the continuously variable transmissions 12, 13, 14, and 15.
前方および後方の予備真空室２，３は第３図お
よび第４図に示すようにそれぞれ一対の上下シー
ルロール１６，１７およびハウジング１８などか
ら構成されており、以下にその詳細を説明する。 As shown in FIGS. 3 and 4, the front and rear preliminary vacuum chambers 2, 3 are each comprised of a pair of upper and lower seal rolls 16, 17, a housing 18, etc., and will be described in detail below.
第３図および第４図において、一方の上シール
ロール１６は両端側がハウジング１８にラジアル
軸受１９および偏心軸受カートリツジ２０を介し
て、他方の下シールロール１７はラジアル軸受１
９および軸受カートリツジ２１を介してそれぞれ
回転自在に支持されており、一方の上シールロー
ル１６は上下方向にも移動可能に支持されてい
る。一方の上シールロール１６は金属例えば鉄と
この鉄の表面全周に固着される弾性体例えば、シ
リコンゴム、ウレタンゴムあるいはニトリルゴム
などのゴムより成つており、他方の下シールロー
ル１７は鉄のみから成つている。２２はケース２
３に固定されたリツプル部材で、このリツプル部
材２２は上下シールロール１６，１７の外周面の
一部と軸方向に沿つて連続的に対接されており、
例えばウレタンゴムなど耐摩耗性の大なるものを
使用する。 In FIGS. 3 and 4, one upper seal roll 16 has both ends connected to a housing 18 via a radial bearing 19 and an eccentric bearing cartridge 20, and the other lower seal roll 17 has a radial bearing 1.
9 and a bearing cartridge 21, respectively, and are rotatably supported, and one upper seal roll 16 is supported so as to be movable in the vertical direction as well. One of the upper seal rolls 16 is made of metal, such as iron, and an elastic body fixed to the entire surface of the iron, such as rubber such as silicone rubber, urethane rubber, or nitrile rubber, and the other lower seal roll 17 is made of only iron. It consists of 22 is case 2
3, this ripple member 22 is in continuous contact with a part of the outer peripheral surface of the upper and lower seal rolls 16, 17 along the axial direction,
For example, use a material with high wear resistance such as urethane rubber.
第５図は上ロール１６を偏心軸受カートリツジ
２０により上下方向へ移動させるための説明図で
ある。第５図において、偏心軸受カートリツジ２
０の中心位置Ａは、上シールロール１６の中心位
置Ｂに対し偏心（偏心量Ｃ）して設けられてお
り、この偏心軸受カートリツジ２０は中心位置Ａ
を回転中心にアーム２４を介してエアシリンダ２
５の操作により図示矢印Ｄ，Ｅ方向へ回動する。
このとき、上シールロール１６は上方向または下
方向へ、すなわち、下シールロール１７に対して
離れる方向または下シールロール１７から押付け
る方向へ移動する。 FIG. 5 is an explanatory view for moving the upper roll 16 in the vertical direction by the eccentric bearing cartridge 20. In FIG. 5, eccentric bearing cartridge 2
The center position A of 0 is provided eccentrically (the amount of eccentricity C) with respect to the center position B of the upper seal roll 16, and the eccentric bearing cartridge 20 is located at the center position A of the upper seal roll 16.
Air cylinder 2 via arm 24 around the center of rotation.
5, it rotates in the directions of arrows D and E shown in the figure.
At this time, the upper seal roll 16 moves upward or downward, that is, in a direction away from the lower seal roll 17 or in a direction pressed against the lower seal roll 17.
次に本発明の動作を説明する。 Next, the operation of the present invention will be explained.
まず、被処理物Ｆの上下シールロール間への挿
入時、一対の上下シールロール１６，１７間にギ
ヤツプを設けるため、エアシリンダ２５の操作に
よりアーム２４を介して偏心軸受カートリツジ２
０を図示矢印Ｅ方向に回動させる。 First, when the workpiece F is inserted between the upper and lower seal rolls, in order to provide a gap between the pair of upper and lower seal rolls 16 and 17, the eccentric bearing cartridge 2 is inserted through the arm 24 by operating the air cylinder 25.
0 in the direction of arrow E shown in the figure.
このようにすれば、上下シールロール１６，１
７間に所望のギヤツプが設けられるため、被処理
物Ｆの上下シールロール１６，１７間への挿入が
容易となる。 In this way, the upper and lower seal rolls 16, 1
Since a desired gap is provided between the seal rolls 7 and 7, it becomes easy to insert the workpiece F between the upper and lower seal rolls 16 and 17.
次に、被処理物Ｆをシールロール１６，１７間
を連続的に搬送するときには、真空を保持するた
めにシールロール１６，１７間のニツプ圧を最適
にする必要がある。このシールロール１６，１７
間のニツプ圧を調整するには、エアシリンダ２５
の操作によりアーム２４を介して偏心軸受カート
リツジ２０を図示矢印Ｄ方向に回動させる。 Next, when the workpiece F is continuously conveyed between the seal rolls 16 and 17, it is necessary to optimize the nip pressure between the seal rolls 16 and 17 in order to maintain the vacuum. This seal roll 16, 17
To adjust the nip pressure between the
By this operation, the eccentric bearing cartridge 20 is rotated in the direction of arrow D in the figure via the arm 24.
このようにエアシリンダ２５を操作すれば、上
シールロール１６は下シールロール１７に対して
押付ける方向へ移動するため、上下シールロール
１６，１７間のニツプ圧の調整を任意に変えるこ
とができる。このとき、ニツプ圧の調整はエアシ
リンダ２５の圧力を変えることにより容易に行な
うことができる。 By operating the air cylinder 25 in this way, the upper seal roll 16 moves in the direction of pressing against the lower seal roll 17, so the adjustment of the nip pressure between the upper and lower seal rolls 16 and 17 can be changed as desired. . At this time, the nip pressure can be easily adjusted by changing the pressure of the air cylinder 25.
また、上下シールロール１６，１７が装置の運
転中に発熱し、その結果、該シールロールがロー
ル軸心より外周方向に膨張し、上下シールロール
間の間隙が狭くなり、ニツプ圧が増加することが
あるが、エアシリンダ２５はエアによるダンパ効
果があるため、該ニツプ圧を吸収し、最適のニツ
プ圧で運転することができ、被処理物に悪影響を
及ぼすことがなく、またシールロールの耐久性を
向上させることができる。 In addition, the upper and lower seal rolls 16 and 17 generate heat during operation of the device, and as a result, the seal rolls expand in the outer circumferential direction from the roll axis, narrowing the gap between the upper and lower seal rolls and increasing the nip pressure. However, since the air cylinder 25 has a damping effect with air, it can absorb the nip pressure and operate at the optimal nip pressure, without adversely affecting the processed material, and also improving the durability of the seal roll. can improve sex.
本発明によれば、初期被処理物挿入時には被処
理物の挿入を容易にすることができ、被処理物の
搬送時にはシールロール間のニツプ圧を任意に調
整することができるので、常にシールロール間隙
を最適の状態に保持することができるとともに、
各種厚さの被処理物に対応することができる。し
たがつて、被処理物の搬送を円滑に行なうことが
できるばかりでなく気体の洩れ量が少なくなり、
予備真空室内を常に適度な真空度に維持すること
ができる。 According to the present invention, it is possible to easily insert the object to be processed when initially inserting the object to be processed, and the nip pressure between the seal rolls can be arbitrarily adjusted when transporting the object to be processed, so that the nip pressure between the seal rolls is always maintained. In addition to being able to maintain the gap in an optimal state,
It can handle objects of various thicknesses. Therefore, not only can the material to be processed be transported smoothly, but also the amount of gas leakage is reduced.
The pre-vacuum chamber can always be maintained at an appropriate degree of vacuum.
第１図は本発明装置の一実施例を示す概略縦断
面図、第２図は第１図の概略平面図、第３図は本
発明装置における予備真空室のシール手段を説明
するための断面図、第４図は第３図の４―４線断
面図、第５図は本発明装置における上シールロー
ルを偏心軸受カートリツジにより上下方向へ移動
させるための説明図である。
１…真空処理室、２，３…予備真空室、１６…
上シールロール、１７…下シールロール、２０…
偏心軸受カートリツジ、２５…シリンダ。
FIG. 1 is a schematic vertical sectional view showing one embodiment of the device of the present invention, FIG. 2 is a schematic plan view of FIG. 4 is a cross-sectional view taken along the line 4--4 in FIG. 3, and FIG. 5 is an explanatory diagram for vertically moving the upper seal roll in the apparatus of the present invention by means of an eccentric bearing cartridge. 1... Vacuum processing chamber, 2, 3... Preliminary vacuum chamber, 16...
Upper seal roll, 17...Lower seal roll, 20...
Eccentric bearing cartridge, 25... cylinder.
Claims (1)
予備真空室とを具え、該予備真空室を、上下一対
のシールロールを被処理物の搬送方向に複数組配
置することにより形成し、前記真空処理室で被処
理物を連続的に処理する真空連続処理装置におい
て、前記一対のシールロールのうち少なくとも一
方のシールロールを偏心軸受で支持し、この偏心
軸受にこれを回動させて対接するシールロール間
のギヤツプおよびニツプ圧を調整する偏心軸受駆
動手段を設けたことを特徴とする真空連続処理装
置。 ２ 駆動手段はシリンダによつて操作するもので
あることを特徴とする特許請求の範囲第１項記載
の真空連続処理装置。[Scope of Claims] 1. A vacuum processing chamber and a preliminary vacuum chamber arranged before and after the vacuum processing chamber, the preliminary vacuum chamber having a plurality of pairs of upper and lower seal rolls arranged in the conveying direction of the object to be processed. In the vacuum continuous processing apparatus for continuously processing the workpiece in the vacuum processing chamber, at least one seal roll of the pair of seal rolls is supported by an eccentric bearing, and the seal roll is supported on the eccentric bearing. 1. A vacuum continuous processing apparatus characterized by being provided with eccentric bearing driving means for rotating and adjusting the gap and nip pressure between seal rolls that are in contact with each other. 2. The vacuum continuous processing apparatus according to claim 1, wherein the driving means is operated by a cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8090181A JPS57195747A (en) | 1981-05-29 | 1981-05-29 | Continuous vacuum treatment apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8090181A JPS57195747A (en) | 1981-05-29 | 1981-05-29 | Continuous vacuum treatment apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57195747A JPS57195747A (en) | 1982-12-01 |
| JPH0153293B2 true JPH0153293B2 (en) | 1989-11-13 |
Family
ID=13731264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8090181A Granted JPS57195747A (en) | 1981-05-29 | 1981-05-29 | Continuous vacuum treatment apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57195747A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011100257A1 (en) * | 2011-05-03 | 2013-01-03 | Maschinenbau Scholz Gmbh & Co Kg | Variable gasket for CV pipe |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5385741A (en) * | 1977-01-07 | 1978-07-28 | Nippon Steel Corp | Continuous evaporation plating method of steel band |
-
1981
- 1981-05-29 JP JP8090181A patent/JPS57195747A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5385741A (en) * | 1977-01-07 | 1978-07-28 | Nippon Steel Corp | Continuous evaporation plating method of steel band |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57195747A (en) | 1982-12-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4551310A (en) | Continuous vacuum treating apparatus | |
| EP0130444B1 (en) | Continuous vacuum treating apparatus | |
| US5088908A (en) | Continuous vacuum processing apparatus | |
| JP4948267B2 (en) | Sheet / film forming apparatus and sheet / film forming method | |
| GB2084264A (en) | Continuous vacuum treating apparatus | |
| JPH0153293B2 (en) | ||
| JP2590200B2 (en) | Vacuum continuous processing equipment | |
| JP2635304B2 (en) | Vacuum processing method | |
| JPS61157535A (en) | Apparatus for continuous treatment in vacuum | |
| JPS60151031A (en) | Vacuum continuously treating apparatus | |
| JPS6365093B2 (en) | ||
| JPS62169830A (en) | Vacuum sealing apparatus | |
| JPS60945A (en) | Continuous vacuum treatment device | |
| JPH0545615B2 (en) | ||
| JPS60151032A (en) | Vacuum continuously treating apparatus | |
| JP2003042298A (en) | Sealing device | |
| JPH0438774B2 (en) | ||
| JPS6059251B2 (en) | Continuous vacuum processing equipment | |
| JPS6365094B2 (en) | ||
| JP2821451B2 (en) | Vacuum processing equipment | |
| JPH04211436A (en) | Vacuum treating device | |
| JP2005060806A (en) | Continuous vacuum treatment apparatus | |
| JPH0455213B2 (en) | ||
| JPH0448492B2 (en) | ||
| JPS60226533A (en) | Apparatus for continuous plasma treatment |