JPS60151032A - Vacuum continuously treating apparatus - Google Patents

Abstract

PURPOSE:To prevent a plasma discharge from occurring at a guide roller bearing and to prevent the bearing from seizing by disposing a bearing cover to form a small gap between the outer periphery of the bearing of guide roller and the bearing. CONSTITUTION:A bearing cover 23 is mounted on a shaft 21 to form a small gap (l) between the outer peripheral side of a bearing 22 of a guide roller 18 for guiding a product to be treated and the bearing. The gap (l) is formed to be 1mm. or less, thereby confirming no plasma discharge in the gap. Thus, the cover 23 is disposed to coat the outer periphery of the bearing 22, thereby preventing the bearing 22 from generating heat and preventing the bearing 22 from seizing. Accordingly, it can normally rotate by the tension of the product. Further, it can prevent the radiation heat form a vacuum treating chamber 1 in which the temperature is raised by the plasma discharge.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a continuous vacuum processing apparatus for continuously plasma processing objects to be processed, such as the gate of the present invention and plastic molded products, such as vinyl chloride resin films, in a vacuum state. The above-mentioned plastic molded product refers to a plastic film, a plastic sheet, a plastic-coated electric wire, etc.

[Background of the invention]

(1) Conventionally, Japanese Patent Laid-Open Publication No. 195748/1983 has disclosed an apparatus in which preliminary vacuum chambers are placed before and after a vacuum processing chamber, and the vacuum pressure is lowered stepwise to continuously surface-treat the workpiece. ing.

By the way, as shown in FIG. 4, the guide roller 18 for conveying the processed material provided in the vacuum processing chamber is rotatably supported via a bearing 22 attached to a shaft 21.
It rotates due to the tension of the object to be processed. However, in the vacuum processing chamber, the temperature of the bearing that supports the guide roller increases due to heat generated by plasma discharge scattered between the positive electrode (not shown) and the guide roller, or radiant heat from the vacuum processing chamber whose temperature has increased due to plasma discharge. This caused the problem that the bearings would become stiff due to the rise and thermal deformation.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a continuous vacuum processing apparatus that prevents stiffness of a bearing that supports a guide roller in a vacuum processing chamber.

[Summary of the invention]

(2) A feature of the present invention is that the bearing cover is arranged so as to form a slight gap between the guide roller and the outer periphery of the bearing that rotatably supports the guide roller.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to the drawings.

In FIGS. 1 and 2, ■ is a vacuum processing chamber in which a flexible workpiece F, such as a plastic film, for example, a vinyl chloride resin film, is subjected to continuous plasma treatment in a vacuum state; 2 is a vacuum processing chamber] A plurality of preliminary vacuum chambers 3 are arranged on the front side of the vacuum processing chamber 1, and a plurality of preliminary vacuum chambers 3 are arranged on the rear side of the vacuum processing chamber 1. It is evacuated through an exhaust pipe 5 to maintain a vacuum pressure of about 2 torr.

Inside the preliminary vacuum chambers 2 and 3 is a vacuum pump 6 connected thereto.
The vacuum processing chamber 1 is evacuated via the exhaust pipe 4 so as to be maintained at a vacuum pressure that is slightly higher than the vacuum pressure inside the vacuum processing chamber 1 and gradually decreases from atmospheric pressure.

The workpiece F to be processed is sent from the unwinding device 8 to the vacuum processing chamber 1 via the preliminary vacuum chamber 2 on the front side (3), where it is subjected to plasma treatment, and then further passed through the preliminary vacuum chamber 3 on the rear side. It is wound up by a winding device 9. 1o is a driving motor, and this driving motor 1o provides driving force to the vacuum processing chamber 1, preliminary vacuum chambers 2, 3, and winding device 9 via a line shaft 11 and continuously variable transmissions 12, 13, 14° 15. The rotational speed of each drive system of the vacuum processing chamber 1, preliminary vacuum chambers 2, 3, and winding device 9 is controlled by the continuously variable transmission 1.2, 13, 14, 15.
Adjustments will be made accordingly.

FIG. 3 shows an overview of the interior of the vacuum processing chamber 1. The vacuum processing chamber 1 includes a drum-shaped cathode 16 and a drum-shaped cathode 16 arranged on the outer circumferential side of the cathode 16 so that the distance between the cathodes can be adjusted. It consists of at least one positive electrode 17 with a crank structure and at least one guide roller 18 that guides the workpiece F.

The guide roller 18 is made of iron or aluminum alloy, and both ends thereof are supported.

In FIG. 5, 21 is a shaft that supports the guide roller 18 via a bearing 22, and 23 is a bearing cover that prevents the bearing 22 from stiffening (4). It is attached to the shaft 21 so as to form a natural gap (Q in the figure).

It has been confirmed through experiments that plasma discharge does not occur in the gap by forming the gap to be 1 ml or less.

By arranging the bearing cover 23 so as to cover the outer periphery of the bearing 22 in this manner, heat generation in the bearing 22 can be prevented, and stiffness in the bearing 22 can be prevented. Therefore, it rotates normally due to the tension of the object F to be processed. It is also possible to prevent radiant heat from the vacuum processing chamber 1 whose temperature has increased due to plasma discharge.

〔Effect of the invention〕

According to the apparatus of the present invention, it is possible to prevent plasma discharge from occurring at the guide roller bearing portion, and the bearing cover can prevent radiant heat from the vacuum processing chamber whose temperature has increased due to the discharge, so that stiffness of the bearing can be prevented.

[Brief explanation of drawings]

FIG. 1 is a schematic vertical cross-sectional view (5) of the continuous vacuum processing apparatus of the present invention, FIG. 2 is a schematic plan view of FIG. 1, FIG. 3 is a side sectional view of the vacuum processing chamber in the apparatus of the present invention, and FIG. The figure is a detailed view of a conventional guide roller, and FIG. 5 is a detailed view of a guide roller in the apparatus of the present invention. 18...Guide roller, 21...Shaft, 22...Bearing. (6)

Claims (1)

[Claims] A vacuum processing chamber, a pre-vacuum chamber, a positive electrode, a negative electrode, and a guide roller for transporting the processed material are provided in the vacuum processing chamber, and the surface of the processed material is continuously conveyed by feeding the processed material between both electrodes. What is claimed is: 1. A continuous vacuum processing apparatus for processing the guide roller, characterized in that a bearing cover is disposed so as to form a slight gap between the guide roller and the outer periphery of a bearing that rotatably supports the guide roller.