JPH0453571U - - Google Patents

Info

Publication number
JPH0453571U
JPH0453571U JP9597990U JP9597990U JPH0453571U JP H0453571 U JPH0453571 U JP H0453571U JP 9597990 U JP9597990 U JP 9597990U JP 9597990 U JP9597990 U JP 9597990U JP H0453571 U JPH0453571 U JP H0453571U
Authority
JP
Japan
Prior art keywords
measured
substrate
casing
electrical characteristic
characteristic measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9597990U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9597990U priority Critical patent/JPH0453571U/ja
Publication of JPH0453571U publication Critical patent/JPH0453571U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図ａ，ｂは本考案の実施例の評価治具を示
した平面図及び断面図である。第２図ａ，ｂは従
来の評価治具の一例を示した平面図及び断面図で
ある。 図において、１はマイクロ波集積回路測定用基
板、３は被測定素子、８は本考案による吸引用の
穴である。なお、各図中、同一符号は同一または
相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 電界効果トランジスタの電気的特性を測定する
    電気的特性測定装置において、被測定素子と電気
    的に接続される電極を有する基板と、この基板及
    び被測定素子を収容する筐体とを備えたものにお
    いて、前記被測定素子を筐体下部より吸引するこ
    とにより、素子を固定することを特徴とする電気
    的特性測定装置。
JP9597990U 1990-09-11 1990-09-11 Pending JPH0453571U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9597990U JPH0453571U (ja) 1990-09-11 1990-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9597990U JPH0453571U (ja) 1990-09-11 1990-09-11

Publications (1)

Publication Number Publication Date
JPH0453571U true JPH0453571U (ja) 1992-05-07

Family

ID=31835148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9597990U Pending JPH0453571U (ja) 1990-09-11 1990-09-11

Country Status (1)

Country Link
JP (1) JPH0453571U (ja)

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